Phase shift mask and its production

TLDR: The phase shifter is constituted of a gelatin layer 1 which is provided in the unexposed part region on a transparent substrate 3 and does not contain a silver component and a silver salt-contg. gelatin layer provided by having a level difference from the gelatin layer.

Abstract: PURPOSE:To simplify the stage for forming a phase shifter and to improve a phase shift effect. CONSTITUTION:The phase shifter is constituted of a gelatin layer 1 which is provided in the unexposed part region on a transparent substrate 3 and does not contain a silver component and a silver salt-contg. gelatin layer provided by having a level difference from the gelatin layer 1 in the exposed part region adjacent to the unexposed part region. The intricate stage for forming the phase shift mask is simplified and the surface contamination of the phase shifter is prevented. The dealing with light of short wavelengths of (i) line or below is possible for the excellent transmissivity of the gelatin and the free adjustment of phase differences is possible. There is an effect of expanding the width of the phase shift effect. Further, the silver salt-contg. gelatin layer existing in the exposed part regions of the pattern parts is reduced. There is thus advantage that even the concn. of the blacked silver salt 2 is freely controllable.