Patent
Piezoelectric element, piezoelectric apparatus and angular velocity sensor
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TLDR
In this article, the authors proposed a solution to provide a piezoelectric element having a high piezelectric constant by using lead zirconate titanate (PZT) which does not satisfy a general formula: Pb 1+y (Zr x Ti 1-x )O 3+y.Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element having a high piezoelectric constant by using lead zirconate titanate (PZT) which does not satisfy a general formula: Pb 1+y (Zr x Ti 1-x )O 3+y like a composition containing excess or deficiency of oxygen, for example, and piezoelectric apparatus including this piezoelectric element like an angular velocity sensor. SOLUTION: The piezoelectric element 2, as well as the piezoelectric apparatus 1 including the element 2, comprises a substrate 5 on which a primary electrode 14, a piezoelectric oxide film 15 and a secondary electrode 16 are laminated. The composition of the piezoelectric oxide film 15 is expressed by the formula below, in which parameters are determined within a specific range. COPYRIGHT: (C)2006,JPO&NCIPIread more
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Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer, surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
TL;DR: In this article, a piezoelectric film is provided having good Pb properties, represented by the following general formula: A1−bB1−aXaO3 wherein A contains Pb; B is at least one of Zr and Ti; X is one of V, Nb, Ta, Cr, Mo and W; a satisfies 0.05≦a≦b≦0.15.
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TL;DR: In this article, a first electrode film 34a is formed on a substrate and a PZT thin film 33 on the first electrode films 34a, thus forming the piezoelectric element 139, which is expressed by a chemical formula Pb 1+X (Zr Y Ti 1-Y )O 3+X, a PbO excess composition ratio X is not less than 0 and not more than 0.3.
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References
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Piezoelectric body thin film element and manufacture thereof, and ink jet recording head employing piezoelectric body thin film element
TL;DR: In this paper, the authors proposed a method to construct a crystal structure of a rhombohedral system having a specific orientation on a piezoelectric body thin film by using an X ray diffraction film.
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TL;DR: In this paper, a lower underlying film is formed on an Si single crystal substrate and an upper underlying film of SiO2 is formed thereon by depositing PtTiO3 on the lower electrode 104 and then an upper electrode (second electrode) 106 of formed of Pt/Ti film on the piezoelectric thin film 105.
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TL;DR: In this paper, a titanate zirconate (PZT) thin film with a chemical formula of Pb 1+y (ZrXTi 1-X)O 3+ Y was used to improve piezoelectric, ferrodielectric and pyroelectric properties by using a PZT thin film having optimum crystal line orientation property and composition.
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