Patent
Reliable, modular, production quality narrow-band high rep rate F2 laser
Thomas Hofmann,Jean-Marc Hueber,Palash P. Das,Toshihiko Ishihara,Thomas P. Duffey,John T. Melchior,Herve A. Besaucele,Richard G. Morton,Richard M. Ness,Peter C. Newman,William N. Partlo,Daniel A. Rothweil,Richard L. Sandstrom +12 more
TLDR
In this paper, the authors presented a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater with the use of a high voltage power supply with a voltage bleed-down circuit.Abstract:
The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber (211); a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module (206) and an output coupler module (216); a wavemeter module (213), an electrical control module (205), a cooling water module (203) and a gas control module (202). Improvements in the pulse power unit to produce faster rise time and improved pulse energy control include: sn increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module (209) that generates a high voltage pulse from the capacitors charged by the high voltage power supply (20) and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. The compression head (207) saturable inductor greatly reduces the quantity of oil required and virtually eliminates the possibility of oil leakage.read more
Citations
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Patent
Laser produced plasma euv light source
Alexander N. Bykanov,Norbert R. Bowering,Igor V. Fomenkov,David C. Brandt,Alexander I. Ershov,Oleh V. Khodykin,William N. Partlo +6 more
TL;DR: In this article, an EUV light source is disclosed that may include a laser source, a CO2 laser, a plasma chamber, and a beam delivery system for passing a laser beam from the laser source into the plasma chamber.
Patent
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
Alexander I. Ershov,William F. Marx,Norbert R. Bowering,Bjorn A. M. Hansson,Oleh V. Khodykin,Igor V. Fomenkov,William N. Partlo +6 more
TL;DR: In this paper, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface.
Patent
Very narrow band, two chamber, high rep rate gas discharge laser system
David S. Knowles,Daniel J. W. Brown,Herve A. Besaucele,David W. Myers,Alexander I. Ershov,William N. Partlo,Richard L. Sandstrom,Palash P. Das,Stuart L. Anderson,Igor V. Fomenkov,Richard C. Ujazdowski,Eckehard D. Onkels,Richard M. Ness,Scott T. Smith,William G Hulburd,Jeffrey Oicles +15 more
TL;DR: An injection seeded modular gas discharge laser system (2) capable of producing high quality pulsed beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater is presented in this paper.
Patent
Euv light source
William N. Partlo,Norbert R. Bowering,Alexander I. Ershov,Igor V. Fomenkov,I. Roger Oliver,John Viatella,Robert N. Jacques +6 more
TL;DR: In this article, an EUV light source and method of operating same is disclosed which may comprise: an UAV plasma production chamber comprising a chamber wall comprising an exit opening for the passage of produced UAV light focused to a focus point; a first EUV exit sleeve comprising a terminal end comprising an opening facing the exit opening; a gas supply mechanism supplying gas under a pressure higher than the pressure within the plasma production chambers to the first exit sleeve chamber.
Patent
Automatic fluorine control system
Jason R. Carlesi,Shahryar Rokni,Mengxiong Gong,Tom A. Watson,Palash P. Das,Michael C. Binder,Muljadi Tantra,David J. Tammadge,Daniel G. Patterson +8 more
TL;DR: An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber is described in this paper. But the system is not designed to operate in a small sweet spot as measured by a narrow range of charging voltage.
References
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Patent
Attachment assembly for integrated circuits
TL;DR: In this article, a thermally conductive slug is mounted on the main circuit board of an integrated circuit to conduct heat generated by the die through a thermal interface to a heat sink or heat pipe.
Patent
Very narrow band laser
TL;DR: In this article, a very narrow band excimer laser is presented, which is capable of producing 10 mJ laser pulses at 1000 Hz with a 95% integral bandwidth of less than 1.5 pm.
Patent
Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
TL;DR: In this article, the main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
Patent
Excimer laser device
Kenyu Haruta,Haruhiko Nagai,Hajime Nakatani,Yoshihiko Yamamoto,Taketoshi Takemura,Takashi Eura,Shungo Tsuboi,Yoshifumi Matsushita,Tadao Minagawa +8 more
TL;DR: In this article, it was shown that the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel.
Patent
Air and water cooled modulator
TL;DR: In this paper, a high power magnetic compression apparatus and method for delivering high voltage pulses of short duration at a high repetition rate and high peak power output which does not require the use of environmentally unacceptable fluids such as chlorofluorocarbons either as a dielectric or as a coolant, and which discharges very little waste heat into the surrounding air.