Patent
Spatial light modulators with light blocking and absorbing areas
TLDR
In this article, a projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed, where two substrates are bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired.Abstract:
A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.read more
Citations
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Patent
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
TL;DR: In this article, a spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry, where one or more electrostatically deflectable elements are suspended by hinges from the upper substrate.
Patent
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TL;DR: In this article, a method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS devices from contamination, physical contact, or other deleterious external events.
Patent
Spatial light modulators with light blocking/absorbing areas
Andrew Huibers,Satyadev R. Patel +1 more
TL;DR: In this article, a projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed, where two substrates can be bonded at the wafer level after depositing a getter material and/or liquid lubricant on one or both of the wafers if desired.
Patent
Display methods and apparatus
TL;DR: In this paper, a control matrix is used to control the movement of MEMs-based light modulators for forming images on a display utilizing a controller matrix to control motion of the modulators.
Patent
Circuits for controlling display apparatus
Nesbitt W. Hagood,Stephen R. Lewis,Abraham Mcallister,Roger Barton,Richard S. Payne,Jasper Lodewyk Steyn +5 more
TL;DR: In this paper, a control matrix is used to control the movement of MEMs-based light modulators for forming images on a display utilizing a controller matrix to control motion of the modulators.
References
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Patent
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
TL;DR: In this article, a spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry, where one or more electrostatically deflectable elements are suspended by hinges from the upper substrate.
Patent
A device having a light-absorbing mask and a method for fabricating same.
TL;DR: In this paper, the authors proposed a method for fabricating an optical device comprising at least one optical component formed on a transparent substrate, which consists of determining an area of the substrate that is to be light absorbing; and fabricating a light absorbing mask on the determined area prior to fabricating the optical component.
Patent
Reflective spatial light modulator with encapsulated micro-mechanical elements
TL;DR: In this article, a spatial light modulator, comprised of an upper and a lower substrate, is used for spatially modulating light that is incident to, and then reflected back through, the upper substrate.
Patent
Method of manufacturing spatial light modulator and electronic device employing it
TL;DR: In this article, a spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together by torsion bars coupling these micromirrors in the x-direction.
Patent
Anti-reflective coatings for spatial light modulators
Frank C. Sulzbach,Brian L. Ray,G. Sreenivas,Duane E. Carter,Henry W. Trombley,Austin L. Huang,James D. Huffman +6 more
TL;DR: In this paper, a spatial light modulator with an anti-reflective coating (ARC) 100 integrated into its structure is described. And the manufacturing of the device is altered to include deposition of an ARC 100, and any necessary patterning and etching to allow the elements of the array to operate properly.