Proceedings ArticleDOI
Study on Retention and Chemical States of Implanted Deuterium Into Boron Thin Film
H. Kodama,Y. Morimoto,Y. Oya,A. Sagara,N. Noda,K. Okuno +5 more
- pp 352-358
About:
The article was published on 2003-06-01. It has received 1 citations till now. The article focuses on the topics: Boron & Chemical state.read more
Citations
More filters
Journal Article
Reduction of Hydrogen Content in Boron Film by Controlling Glow Discharge Conditions
TL;DR: In this paper, the hydrogen content in boron films produced with DC glow discharge was first investigated at room temperature in plasma processing teststand (PPT) by measuring dependences on B 10 H 14 flow rate, mixing ratio in helium, discharge power, and total pressure.
References
More filters
Journal ArticleDOI
XPS study of the process of oxygen gettering by thin films of PACVD boron
M.M Ennaceur,B. Terreault +1 more
TL;DR: In this article, it was found that the state of the samples after boronization is the most reliable predictor of subsequent machine performance, while the oxide always remains substoichiometric.
Journal ArticleDOI
Initial Boronization of JT-60U Tokamak Using Decaborane
Masahiro Saidoh,Norio Ogiwara,Michiya Shimada,Takashi Arai,Hajime Hiratsuka,T. Koike,Shimizu Masatsugu,Hiromasa Ninomiya,Hiroo Nakamura,R. Jimbou,Jyunichi Yagyu,Tatsuo Sugie,Akira Sakasai,Nobuyuki Asakura,M. Yamage,Hideo Sugai,Gary L. Jackson +16 more
TL;DR: A decaborane-based boronization system has been installed in the JT-60U tokamak in order to reduce the influx of impurities during plasma discharges.
Journal ArticleDOI
Oxidation behaviour of boron carbide
TL;DR: In this paper, the oxidation behavior of various boron-carbide samples have been studied by photoelectron spectroscopy, and the highest reactivity against oxidation was obtained during the growth of a BCR surface phase which revealed a marked oxygen gettering effect.
Journal ArticleDOI
Properties of a-C/B : H films relevant to plasma—surface interactions
J. von Seggern,P. Wienhold,H.G. Esser,J. Winter,A.E. Gorodetsky,S.A. Grashin,I. Gudowska,Guy G. Ross +7 more
TL;DR: In this article, thin boron doped carbonaceous films have been deposited on metal alloys (stainless steel, Inconel), graphite and silicon single crystals during the boroneization procedures in TEXTOR, they show a very good adhesion to all the substrates investigated, they are hard, semitransparent, amorphous and homogeneous down to about 3 nm.
Journal ArticleDOI
Reduction of hydrogen content in boron film by controlling glow discharge conditions
TL;DR: In this article, the hydrogen content in boron films produced with DC glow discharge was first investigated at room temperature in plasma processing teststand (PPT) by measuring dependences on B 10 H 14 flow rate, mixing ratio in helium, discharge power, and total pressure.
Related Papers (5)
Si SiO2 Interface Passivation Using Hydrogen and Deuterium Implantation
T. Kundu,Durga Misra +1 more