Journal ArticleDOI
Voltage and pull-in time in current drive of electrostatic actuators
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In this article, the absolute maximum voltage developed across an electrostatic actuator when driven by a current source has been calculated as well as an absolute minimum for the pull-in time for a drive using a /spl delta/-pulse of current and numerical assessment is given to show that for a nonzero parasitic capacitance, a realistic shape of the current pulse, or a finite value of the damping coefficient do not increase the maximum value of voltage developed beyond that limit.Abstract:
The absolute maximum value of the voltage developed across an electrostatic actuator when driven by a current source has been calculated as well as an absolute minimum for the pull-in time. These two results are calculated for a drive using a /spl delta/-pulse of current and numerical assessment is given to show that for a nonzero parasitic capacitance, a realistic shape of the current pulse, or a finite value of the damping coefficient do not increase the maximum value of the voltage developed beyond that limit and that the pull-in time is always larger than the analytical minimum. A scaled-up macromodel of an electrostatic actuator has been used to register voltage transients to validate the theoretical predictions.read more
Citations
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
A soft landing waveform for actuation of a single-pole single- throw ohmic RF MEMS Switch.
Anton Hartono Sumali,David A. Czaplewski,Jaron D. Kuppers,Jordan E. Massad,Christopher W. Dyck,Isak C. Reines,William D. Cowan,Christopher P. Tigges +7 more
TL;DR: In this article, a soft-landing actuation waveform was designed to reduce the bounce of a single-pole single-throw (SPST) ohmic radio frequency (RF) microelectromechanical systems (MEMS) switch during actuation.
Journal ArticleDOI
A Soft-Landing Waveform for Actuation of a Single-Pole Single-Throw Ohmic RF MEMS Switch
David A. Czaplewski,Christopher W. Dyck,Hartono Sumali,Jordan E. Massad,Jaron D. Kuppers,Isak C. Reines,William D. Cowan,Christopher P. Tigges +7 more
TL;DR: In this article, a soft-landing actuation waveform was designed to reduce the bounce of a single-pole single-throw (SPST) ohmic radio frequency (RF) microelectromechanical systems (MEMS) switch during actuation.
Journal ArticleDOI
Materials selection for microfabricated electrostatic actuators
V. T. Srikar,S.M. Spearing +1 more
TL;DR: In this article, the authors apply the Ashby methodology to the selection of materials for electrostatic actuators for a wide variety of microelectromechanical systems (MEMS) applications ranging from relays and switches to valves and displays.
Journal ArticleDOI
Soft dielectric elastomer actuator micropump
Farah Afiqa Mohd Ghazali,Che Ken Mah,Alaa AbuZaiter,Pei Song Chee,Mohamed Sultan Mohamed Ali +4 more
TL;DR: In this article, a miniaturized soft dielectric elastomer actuator (DEA) micropump was demonstrated in microfluidic application, where a strain-induced pre-stretched DEA undergoes expansion when subjected to high voltage, providing a two-way actuation in the presence of a pull-up spring.
References
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Journal ArticleDOI
Extending the travel range of analog-tuned electrostatic actuators
E.S. Hung,S.D. Senturia +1 more
TL;DR: In this paper, the authors examined the "leveraged bending" and "strain-stiffening" methods for extending the travel range of elastically suspended parallel-plate electrostatic microactuators.
Proceedings ArticleDOI
A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz
J.J. Yao,M.F. Chang +1 more
TL;DR: In this paper, a surface micromachined miniature switch has been made on a semi-insulating GaAs substrate using a suspended silicon dioxide micro-beam as the cantilevered arm, a platinum-to-gold electrical contact, and electrostatic actuation as the switching mechanism.
Journal ArticleDOI
Charge control of parallel-plate, electrostatic actuators and the tip-in instability
J.I. Seeger,Bernhard E. Boser +1 more
TL;DR: In this paper, the authors show that the maximum stable deflection is limited by 1) charge pull-in, in which the actuator snaps due to the presence of parasitic capacitance and 2) tip-in in which rotation mode becomes unstable.
Proceedings ArticleDOI
Stabilization of electrostatically actuated mechanical devices
J.I. Seeger,S.B. Crary +1 more
TL;DR: In this article, the pull-in instability of electrostatically actuated devices can be avoided by the simple addition of a series capacitance, which can be used to avoid the need for a series capacitor.
Journal ArticleDOI
Electrostatic micromechanical actuator with extended range of travel
E.K. Chan,Robert W. Dutton +1 more
TL;DR: In this article, a series capacitor is employed to extend the effective electrical gap of the actuator and to provide stabilizing negative feedback, and the effects of residual charge are analyzed.
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