A
A. Seppälä
Researcher at University of Helsinki
Publications - 2
Citations - 1802
A. Seppälä is an academic researcher from University of Helsinki. The author has contributed to research in topics: Barrier layer. The author has an hindex of 2, co-authored 2 publications receiving 1802 citations.
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Reliability of tantalum based diffusion barriers between Cu and Si
TL;DR: In this article, the reaction mechanisms in the Si|Ta|Cu and Si |TaC|Cu metallization systems are discussed based on the experimental results and assessed ternary Si-Ta-Cu, SiTa-C and Ta-C-Cu phase diagrams in order to compare the thermodynamic properties of the TaC diffusion barriers to more widely investigated TaNx diffusion barriers.