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Ilkka Suni

Researcher at VTT Technical Research Centre of Finland

Publications -  63
Citations -  3333

Ilkka Suni is an academic researcher from VTT Technical Research Centre of Finland. The author has contributed to research in topics: Silicon & Wafer. The author has an hindex of 20, co-authored 63 publications receiving 3301 citations. Previous affiliations of Ilkka Suni include Aalto University.

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Effects of Plasma Activation on Hydrophilic Bonding of Si and SiO2

TL;DR: In this paper, a low-temperature bonding of wafers was studied utilizing reactive ion etching-mode plasma activation, where the hydrophilic Si and thermally oxidized Si wafer were exposed to N 2, Ar, or O 2 plasma prior to bonding in air or vacuum.
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Reactive sputter deposition and properties of Ta x N thin films

TL;DR: In this article, the authors evaluate tantalum nitride thin films fabricated using reactive sputtering with adjusted deposition parameters and determine the value of temperature coefficient of resistance (TCR) determined for the Ta2N resistor was - 103 ppm/°C.
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Mechanically induced Si layer transfer in hydrogen-implanted Si wafers

TL;DR: In this article, the authors used the crack opening method to measure the surface energy of single-crystal silicon wafers after hydrogen ion implantation, low-temperature wafer bonding and subsequent mechanical splitting of the implanted wafer.
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Characterization of low-temperature processed single-crystalline silicon thin-film transistor on glass

TL;DR: In this paper, a single-crystalline silicon thin film on glass (cSOG) has been prepared using an "ion-cutting" based "layer-transfer" technique.