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Showing papers by "Adisorn Tuantranont published in 2003"


Journal ArticleDOI
TL;DR: In this article, a micro-optical system for VCSEL-to-fiber active alignment is described, which has a thermally-actuated micromirror, a silicon etched v-groove and flip-chip function.
Abstract: In this paper, a new micro-optical system for VCSEL-to-fiber active alignment is described. An integrated microsystem platform, which has a thermally-actuated micromirror, a silicon etched v-groove and flip-chip function, is successfully fabricated and actuated for beam adjustment from a vertical-cavity surface-emitting laser (VCSEL) to a fiber. The micro-optical system has 4.0° maximum beam steering angle with the resolution of 0.08°/mA. With the steering angle reaching 2.5°, the coupling efficiency from the VCSEL to the fiber improves to more than 80% from 9% initial efficiency of 25 μm misaligned fiber position.

44 citations


Journal ArticleDOI
TL;DR: In this paper, the authors investigated the thermal mechanism between laser and surface-micromachined micromirrors and found that heat conduction through the gas gap between the mirror surface and the substrate is the dominant thermal dissipation mechanism for high surrounding gas pressure.
Abstract: This paper presents the results of an investigation of the thermal mechanism between lasers and surface-micromachined micromirrors. Finite element models using ABAQUS are established and used to study the temperature distribution on the surface of micromirrors under high-power laser illumination. It is shown that heat conduction through the gas gap between the mirror surface and the substrate is the dominant thermal dissipation mechanism for high surrounding gas pressure, while heat conduction through the flexures is dominant for low surrounding gas pressure. Based on the simulation results, two novel methods are proposed in order to tolerate more power input under low surrounding gas pressure. The results of optical power testing validate these models, and indicate that these two approaches are efficient in improving micromirror performance for high-energy applications.

13 citations


Proceedings ArticleDOI
01 Feb 2003
TL;DR: The emerging technology of micro-optical-electro-mechanical systems (MOEMS) offer promise for automating the alignment of free-space optical systems, especially intra-computer optical interconnects as mentioned in this paper.
Abstract: The emerging technology of micro-optical-electro-mechanical systems (MOEMS) offer promise for automating the alignment of free-space optical systems, especially intra-computer optical interconnects. MOEMS-based microlenses and micromirrors have been fabricated for the purpose of providing initial system alignment and dynamic alignment.