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Connie Y.N. Liaw
Researcher at Hong Kong University of Science and Technology
Publications - 1
Citations - 113
Connie Y.N. Liaw is an academic researcher from Hong Kong University of Science and Technology. The author has contributed to research in topics: Thin film & Anodic bonding. The author has an hindex of 1, co-authored 1 publications receiving 110 citations.
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Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates
TL;DR: In this article, anodic bonding between Si-based and glass substrates has been characterized in detail, and the effects of magnitude of applied voltage, surface properties (coating of Si substrate), and surface cleanliness (pre-bonding cleaning procedure) on the time required for complete bonding were thoroughly studied.