An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

Biology is replete with materials systems that actively and functionally respond to mechanical stimuli and thereby enable physiological processes such as the sense of touch, hearing or the growth of tissue and bone. In contrast, exposing polymers to large stresses tends to result in covalent bond rupture and hence damage or failure. Davis et al. now demonstrate that synthetic materials can be rationally designed to ensure that mechanical stress alters their properties in a useful manner. This is realized by incorporating a chemical group that responds to mechanical stress by changing its colour to red as it undergoes a ring-opening reaction, enabling the team to directly monitor the accumulation of plastic deformation. The principles underpinning this work should enable the development of other force-responsive chemical groups that could impart synthetic materials with desirable functionalities ranging from damage sensing to fully regenerative self-healing. Exposing synthetic materials to large stresses tends to result in simple failure, unlike many biological systems, which respond by enabling physiological processes such as hearing and balance. But by incorporating a chemical group that responds to mechanical stress by changing its colour, it is possible to monitor the accumulation of plastic deformation directly in a synthetic polymer. This principle could be used to design synthetic materials with desirable functionalities ranging from damage sensing to fully regenerative self-healing. Mechanochemical transduction enables an extraordinary range of physiological processes such as the sense of touch, hearing, balance, muscle contraction, and the growth and remodelling of tissue and bone1,2,3,4,5,6. Although biology is replete with materials systems that actively and functionally respond to mechanical stimuli, the default mechanochemical reaction of bulk polymers to large external stress is the unselective scission of covalent bonds, resulting in damage or failure7. An alternative to this degradation process is the rational molecular design of synthetic materials such that mechanical stress favourably alters material properties. A few mechanosensitive polymers with this property have been developed8,9,10,11,12,13,14; but their active response is mediated through non-covalent processes, which may limit the extent to which properties can be modified and the long-term stability in structural materials. Previously, we have shown with dissolved polymer strands incorporating mechanically sensitive chemical groups—so-called mechanophores—that the directional nature of mechanical forces can selectively break and re-form covalent bonds15,16. We now demonstrate that such force-induced covalent-bond activation can also be realized with mechanophore-linked elastomeric and glassy polymers, by using a mechanophore that changes colour as it undergoes a reversible electrocyclic ring-opening reaction under tensile stress and thus allows us to directly and locally visualize the mechanochemical reaction. We find that pronounced changes in colour and fluorescence emerge with the accumulation of plastic deformation, indicating that in these polymeric materials the transduction of mechanical force into the ring-opening reaction is an activated process. We anticipate that force activation of covalent bonds can serve as a general strategy for the development of new mechanophore building blocks that impart polymeric materials with desirable functionalities ranging from damage sensing to fully regenerative self-healing.

Force-induced activation of covalent bonds in mechanoresponsive polymeric materials

This Review summarizes recent developments in the field of responsive photonic crystal structures, including principles for design and fabrication and many strategies for applications, for example as optical switches or chemical and biological sensors. A number of fabrication methods are now available to realize responsive photonic structures, the majority of which rely on self-assembly processes to achieve ordering. Compared with microfabrication techniques, self-assembly approaches have lower processing costs and higher production efficiency, however, major efforts are still needed to further develop such approaches. In fact, some emerging techniques such as spin coating, magnetic assembly, and flow-induced self-assembly have already shown great promise in overcoming current challenges. When designing new systems with improved performance, it is always helpful to bear in mind the lessons learnt from natural photonic structures.

Responsive photonic crystals.

In response to the current environmental regulations against the use of lead in daily electronic devices, a number of investigations have been performed worldwide in search for alternative piezoelectric ceramics that can replace the market-dominating lead-based ones, representatively Pb(Zr
 x
 Ti1-x
 )O3 (PZT)-based solid solutions. Selected systems of potential importance such as chemically modified and/or crystallographically textured (K, Na)NbO3 and (Bi1/2Na1/2)TiO3-based solid solutions have been developed. Nevertheless, only few achievements have so far been introduced to the marketplace. A recent discovery has greatly extended our tool box for material design by furnishing (Bi1/2Na1/2)TiO3-based ceramics with a reversible phase transition between an ergodic relaxor state and a ferroelectric with the application of electric field. This paired the piezoelectric effect with a strain-generating phase transition and extended opportunities for actuator applications in a completely new manner. In this contribution, we will present the status and perspectives of this new class of actuator ceramics, aiming at covering a wide spectrum of topics, i.e., from fundamentals to practice.

Giant electric-field-induced strains in lead-free ceramics for actuator applications – status and perspective

Colloidal particles may be considered as building blocks for materials, just like atoms are the bricks of molecules, macromolecules, and crystals. Periodic arrays of colloids (colloidal crystals) have attracted much interest over the last two decades, largely because of their unique photonic properties. The archetype opal structures are based on close-packed arrays of spheres of submicrometer diameter. Interest in structuring materials at this length scale, but with more complex features and ideally by self-assembly processes, has led to much progress in controlling features of both building blocks and assemblies. The necessary ingredients include colloids, colloidal clusters, and colloidal "molecules" which have special shapes and the ability to bind directionally, the control over short-range and long-range interactions, and the capability to place and orientate these bricks. This Review highlights recent experimental and theoretical progress in the assembly of colloids larger than 50 nm.

Colloidal Assembly: The Road from Particles to Colloidal Molecules and Crystals

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Photonic crystal composites with reversible high-frequency stop band shifts

Piezoelectric micromachined ultrasound transducers (pMUTs) are a new approach for the construction of 2-D arrays for forward-looking 3-D intravascular (IVUS) and intracardiac (ICE) imaging. Two-dimensional pMUT test arrays containing 25 elements (5 times 5 arrays) were bulk micromachined in silicon substrates. The devices consisted of lead zirconate titanate (PZT) thin film membranes formed by deep reactive ion etching of the silicon substrate. Element widths ranged from 50 to 200 mum with pitch from 100 to 300 mum. Acoustic transmit properties were measured in de-ionized water with a calibrated hydrophone placed at a range of 20 mm. Measured transmit frequencies for the pMUT elements ranged from 4 to 13 MHz, and mode of vibration differed for the various element sizes. Element capacitance varied from 30 to over 400 pF depending on element size and PZT thickness. Smaller element sizes generally produced higher acoustic transmit output as well as higher frequency than larger elements. Thicker PZT layers also produced higher transmit output per unit electric field applied. Due to flexure mode operation above the PZT coercive voltage, transmit output increased nonlinearly with increased drive voltage. The pMUT arrays were attached directly to the Duke University T5 phased array scanner to produce real-time pulse-echo B-mode images with the 2-D pMUT arrays.

Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers

A piezoelectric micromachined ultrasonic transducer comprising a substrate and a first dielectric film formed on the substrate. An opening having a sidewall is formed through the substrate and first dielectric film. A bottom electrode is formed on the first dielectric film spanning the opening. A piezoelectric element is formed on the bottom electrode. A second dielectric film surrounds the piezoelectric element. A conformal insulating film is formed on the sidewall of the opening. A conformal conductive film is formed in contact with the bottom electrode and on the sidewall of the opening, wherein an open cavity is maintained in the opening. A top electrode is formed in contact with the piezoelectric element.

Piezoelectric micromachined ultrasonic transducer with air-backed cavities

A method of generating an enhanced receive signal from a piezoelectric ultrasound transducer is described. The method comprises providing a piezoelectric ultrasound transducer comprising a piezoelectric element operable in flexural mode, receiving a acoustic signal by the piezoelectric element, applying a DC bias to the piezoelectric element prior to receiving the acoustic signal and/or concurrently with receiving the acoustic signal, and generating an enhanced receive signal from the piezoelectric element as a result of receiving the acoustic signal by the piezoelectric element. pMUT-based imaging probes using the above method are also described.

Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers

Piezoelectric micromachined ultrasound transducer (PMUT) matrix arrays were fabricated containing novel through-silicon interconnects and integrated into intracardiac catheters for in vivo real-time 3-D imaging. PMUT arrays with rectangular apertures containing 256 and 512 active elements were fabricated and operated at 5 MHz. The arrays were bulk micromachined in silicon-on-insulator substrates, and contained flexural unimorph membranes comprising the device silicon, lead zirconate titanate (PZT), and electrode layers. Through-silicon interconnects were fabricated by depositing a thin-film conformal copper layer in the bulk micromachined via under each PMUT membrane and photolithographically patterning this copper layer on the back of the substrate to facilitate contact with the individually addressable matrix array elements. Cable assemblies containing insulated 45-AWG copper wires and a termination silicon substrate were thermocompression bonded to the PMUT substrate for signal wire interconnection to the PMUT array. Side-viewing 14-Fr catheters were fabricated and introduced through the femoral vein in an adult porcine model. Real-time 3-D images were acquired from the right atrium using a prototype ultrasound scanner. Full 60° × 60° volume sectors were obtained with penetration depth of 8 to 10 cm at frame rates of 26 to 31 volumes per second.

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David Dausch

Papers

Photonic crystal composites with reversible high-frequency stop band shifts

Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers

Piezoelectric micromachined ultrasonic transducer with air-backed cavities

Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers

In vivo real-time 3-D intracardiac echo using PMUT arrays.