D
David L. Willenborg
Researcher at Westinghouse Electric
Publications - 29
Citations - 2084
David L. Willenborg is an academic researcher from Westinghouse Electric. The author has contributed to research in topics: Beam (structure) & Thin film. The author has an hindex of 18, co-authored 29 publications receiving 2064 citations.
Papers
More filters
Journal ArticleDOI
Detection of thermal waves through optical reflectance
TL;DR: In this article, thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature, which is demonstrated by an example of measuring the thickness of thin metal films.
Journal ArticleDOI
Thermal-wave detection and thin-film thickness measurements with laser beam deflection
TL;DR: A new technique has been developed that employs highly focused laser beams for both generating and detecting thermal waves in the megahertz frequency regime and includes a comprehensive 3-D depth-profiling theoretical model; it has been used to measure the thickness of both transparent and opaque thin films with high spatial resolution.
Patent
High resolution ellipsometric apparatus
TL;DR: In this article, the angle of incidence of one or more rays in the incident probe beam is determined based on the radial position of the rays within the reflected probe beam, which provides enhanced spatial resolution and allows measurement over a wide spread of angles of incidence without adjusting the position of optical components.
Patent
Method and apparatus for measuring thickness of thin films
TL;DR: In this paper, the angular dependent intensity measurements were used to solve the layer thickness using variations of the Fresnel equations, which is particularly suitable for measuring thin films, such as oxide layers, on silicon semiconductor samples.
Journal ArticleDOI
Ion implant monitoring with thermal wave technology
TL;DR: In this article, thermal wave technology is used to monitor the ion implantation process in silicon, which is a noncontact, non-destructive technique that requires no special sample preparation or processing, has high sensitivity even at low dose, and provides a onemicron spatial resolution capability.