Chemical vapour deposition of coatings

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THE major problem with the use of ceramics as structural materials is their brittleness. One way of overcoming this problem is to introduce weak interfaces which deflect a growing crack1. Polymer composites of this sort can be easily prepared by surrounding fibres with liquid plastic. To make similar structures with ceramic matrices and fibres is difficult and expensive, however, because traditional ceramic processing techniques of powder compaction and sintering prevent densification and cause cracking2–4. Here we describe a simple, inexpensive way of preparing a ceramic material that contains such weak interfaces. Silicon carbide powder is made into thin sheets which are coated with graphite to give weak interfaces and then pressed together and sintered without pressure. Relative to the monolithic material, the apparent fracture toughness for cracks propagating normal to the weak interfaces is increased more than fourfold, and the work required to break the samples increases by substantially more than a hundredfold. The technique should be readily applicable to other ceramics.

A simple way to make tough ceramics

This paper reviews the present knowledge on tantalum pentoxide (Ta 2 O 5 ) thin films and their applications in the field of microelectronics and integrated microtechnologies. Different methods used to produce tantalum oxide layers are described, emphazing elaboration mechanisms and key parameters for each technique. We also review recent advances in the deposition of Ta 2 O 5 in the particular field of microelectronics where high quality layers are required from the structural and electrical points of view. The physical, structural, optical, chemical and electrical properties of tantalum oxide thin films on semiconductors are then presented and essential film parameters, such as optical index, film density or dielectric permittivity, are discussed. After a reminder of the basic mechanisms that control the bulk electrical conduction in insulating films, we carefully examine the origin of leakage currents in Ta 2 O 5 and present the state-of-the-art concerning the insulating behaviour of tantalum oxide layers. Finally, applications of tantalum oxide thin films are presented in the last part of this paper. We show how Ta 2 O 5 has been employed as an antireflection coating, insulating layer, gate oxide, corrosion resistant material, and sensitive layer in a wide variety of components, circuits and sensors.

Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications

Ceramic materials in general have a very attractive package of properties: high strength and high stiffness at very high temperatures, chemical inertness, low density, and so on. This attractive package is marred by one deadly flaw, namely, an utter lack of toughness. They are prone to catastrophic failures in the presence of flaws (surface or internal). They are extremely susceptible to thermal shock and are easily damaged during fabrication and/or service. It is therefore understandable that an overriding consideration in ceramic matrix composites (CMCs) is to toughen the ceramics by incorporating fibers in them and thus exploit the attractive high-temperature strength and environmental resistance of ceramic materials without risking a catastrophic failure. It is worth pointing out at the very outset that there are certain basic differences between CMCs and other composites. The general philosophy in nonceramic matrix composites is to have the fiber bear a greater proportion of the applied load. This load partitioning depends on the ratio of fiber and matrix elastic moduli, Ef/Em. In nonceramic matrix composites, this ratio can be very high, while in CMCs, it is rather low and can be as low as unity; think of alumina fiber reinforced alumina matrix composite. Another distinctive point regarding CMCs is that because of limited matrix ductility and generally high fabrication temperature, thermal mismatch between components has a very important bearing on CMC performance. The problem of chemical compatibility between components in CMCs has ramifications similar to those in, say, MMCs. We first describe some of the processing techniques for CMCs, followed by a description of some salient characteristics of CMCs regarding interface and mechanical properties and, in particular, the various possible toughness mechanisms, and finally a description of some applications of CMCs.

Ceramic Matrix Composites

The continuous-filament ceramic composite is becoming recognized as necessary for new, high-temperature structural applications. Yet because of the susceptibility of the filaments to damage from traditional methods for the preparation of ceramics, vapor-phase infiltration has become the fabrication method of choice. The chemical vapor infiltration methods for producing these composites are now being studied in earnest, with the complexity of filament weaves and deposition chemistry being merged with standard heat and mass-transport relationships. Two of the most influential effects on the mechanical properties of these materials are the adhesion and frictional force between the fibers and the matrix, which can be controlled by a tailored interface coating. A variety of materials are available for producing these composites including carbide, nitride, boride, and oxide filaments and matrices. Silicon carbide-based materials are by far the most advanced and are already being used in aerospace applications.

https://science.sciencemag.org/content/sci/253/5024/1104.full.pdf

Vapor-phase fabrication and properties of continuous-filament ceramic composites.

This feature article explores the concept of creating functionally graded metal-ceramic composite microstructures for thermal barrier coatings used in gas-turbine applications. From a thermomechanical perspective, this concept offers the possibility of significantly improving the life and reliability of thermal barrier coatings. However, prior research reveals that progress has been somewhat limited because of the oxidative instability exhibited by some metal-ceramic composite microstructures. The present study addresses some of the materials criteria and research issues associated with preparing chemically stable, yet mechanically durable, graded metal-ceramic microstructures for realistic application environments.

Concept of Functionally Graded Materials for Advanced Thermal Barrier Coating Applications

Fabrication de composites par infiltration et depot chimique en phase vapeur de SiC dans une structure fibreuse de SiC. L'utilisation d'un gradient thermique et d'un ecoulement gazeux force permet de reduire la duree d'infiltration. On etudie les proprietes mecaniques de ces composites

Synthesis of fiber-reinforced SiC composites by chemical vapor infiltration

Advanced ceramics by chemical vapor deposition techniques

Continued development of ceramic-ceramic composites has produced SiC-reinforced SiC composites with enhanced physical and mechanical properties. Composites have been produced with exceptional strain tolerance (strain gage derived) and fracture toughness values which are significantly higher than those of nonreinforced SiC. Flexural strengths at both room temperature and at elevated temperatures also are presented.

David P. Stinton

Papers

Vapor-phase fabrication and properties of continuous-filament ceramic composites.

Concept of Functionally Graded Materials for Advanced Thermal Barrier Coating Applications

Synthesis of fiber-reinforced SiC composites by chemical vapor infiltration

Advanced ceramics by chemical vapor deposition techniques

Fiber-reinforced SiC composites with improved mechanical properties