F
F. Niebelschuetz
Researcher at Technische Universität Ilmenau
Publications - 9
Citations - 123
F. Niebelschuetz is an academic researcher from Technische Universität Ilmenau. The author has contributed to research in topics: Resonator & Piezoelectricity. The author has an hindex of 4, co-authored 9 publications receiving 115 citations.
Papers
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Journal ArticleDOI
Micro‐ and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications
K. Brueckner,F. Niebelschuetz,Katja Tonisch,Ch. Foerster,Volker Cimalla,Ralf Stephan,Jörg Pezoldt,Thomas Stauden,Oliver Ambacher,Matthias Hein +9 more
TL;DR: In this article, the authors report on resonant MEMS and NEMS devices with functional layers of SiC, AlN and AlGaN/GaN heterostructures on different substrates, which have been investigated and analyzed in the course of an interdisciplinary research focus program of the German Research Foundation (DFG).
Journal ArticleDOI
Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators
K. Brueckner,F. Niebelschuetz,Katja Tonisch,S. Michael,Armin Dadgar,Alois Krost,V. Cimalla,Oliver Ambacher,Ralf Stephan,Matthias Hein +9 more
TL;DR: In this paper, a free-standing piezoelectric AlGaN/GaN beam resonators have been prepared on silicon substrates and the two-dimensional electron gas at the interface of the III/V heterostructure has been employed to act as back electrode for the active layer.
Journal ArticleDOI
AlGaN/GaN-heterostructures on (111) 3C-SiC/Si pseudo substrates for high frequency applications
Katja Tonisch,Wael Jatal,F. Niebelschuetz,Henry Romanus,Uwe Baumann,Frank Schwierz,Jörg Pezoldt +6 more
Journal ArticleDOI
Piezoelectric actuated epitaxially grown AlGaN/GaN‐resonators
F. Niebelschuetz,K. Brueckner,Katja Tonisch,Ralf Stephan,Volker Cimalla,Oliver Ambacher,Matthias Hein +6 more
TL;DR: In this article, the authors presented a novel concept of piezoelectrically actuated MEMS resonators based on AlGaN/GaN-heterostructures.
Proceedings ArticleDOI
Resonant Piezoelectric ALGaN/GaN MEMS Sensors in Longitudinal Mode Operation
K. Brueckner,F. Niebelschuetz,Katja Tonisch,Ralf Stephan,Volker Cimalla,Oliver Ambacher,Matthias Hein +6 more
TL;DR: In this paper, a free-standing piezoelectric AlGaN/GaN beam resonator has been prepared on silicon substrates using a semiconductor fabrication process.