G
Gary Yama
Researcher at Bosch
Publications - 99
Citations - 1886
Gary Yama is an academic researcher from Bosch. The author has contributed to research in topics: Layer (electronics) & Atomic layer deposition. The author has an hindex of 20, co-authored 99 publications receiving 1780 citations. Previous affiliations of Gary Yama include Stanford University.
Papers
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Journal ArticleDOI
Temperature Dependence of Quality Factor in MEMS Resonators
Bongsang Kim,Matthew A. Hopcroft,Rob N. Candler,C.M. Jha,M. Agarwal,Renata Melamud,Saurabh A. Chandorkar,Gary Yama,Thomas W. Kenny +8 more
TL;DR: In this article, the authors analyzed the temperature dependence of the quality factor of microelectromechanical system (MEMS) resonators and measured the sensitivity of up to 1% changes in quality factor per degree Celsius change of temperature.
Journal ArticleDOI
Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators
Rob N. Candler,Matthew A. Hopcroft,Bongsang Kim,Woo-Tae Park,Renata Melamud,Manu Agarwal,Gary Yama,Aaron Partridge,Markus Lutz,Thomas W. Kenny +9 more
TL;DR: In this paper, a single-wafer vacuum encapsulation for microelectromechanical systems (MEMS) using a 20-mum polysilicon encapsulation was developed.
Journal ArticleDOI
Single wafer encapsulation of MEMS devices
TL;DR: In this article, the authors present a packaging solution applicable to several common MEMS devices, such as inertial sensors and micromechanical resonators, which involves deposition of a 20 /spl mu/m layer of epi-polysilicon over unreleased devices to act as a sealing cap, release of the encapsulated parts via an HF vapor release process, and a final seal of the parts in 7 mbar (700 Pa) vacuum.
Journal ArticleDOI
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams
Rob N. Candler,Amy Duwel,M. Varghese,Saurabh A. Chandorkar,Matthew A. Hopcroft,Woo-Tae Park,Bongsang Kim,Gary Yama,Aaron Partridge,Markus Lutz,Thomas W. Kenny +10 more
TL;DR: In this article, the authors analyzed the impact of resonator design (i.e., slots machined into flexural beams) on TED-limited quality factor for complex geometries of micromechanical resonators.
Patent
Anti-stiction technique for electromechanical systems and electromechanical device employing same
TL;DR: In this article, the authors proposed a method to construct a channel cap with at least one preform portion disposed over or in at least a portion of an anti-stiction channel, at least in part.