Renata Melamud

TL;DR: In this article, the authors analyzed the temperature dependence of the quality factor of microelectromechanical system (MEMS) resonators and measured the sensitivity of up to 1% changes in quality factor per degree Celsius change of temperature.

TL;DR: In this paper, a single-wafer vacuum encapsulation for microelectromechanical systems (MEMS) using a 20-mum polysilicon encapsulation was developed.

TL;DR: In this article, a temperature compensation system for micro-resonator-based frequency references is presented, which consists of a phase-locked loop (PLL) whose inputs are derived from two microresonators with different temperature coefficients of frequency.

TL;DR: In this article, composite resonators with zero linear temperature coefficient of frequency were fabricated and characterized, and the resulting resonators have a quadratic temperature coefficient for Young's modulus of approximately -20 ppb/degC2 and a tunable turnover temperature in the -55degC to 125degC range.

TL;DR: In this paper, the authors present the dominant energy loss mechanisms and quality factor (Q) limits in bulk mode micromechanical resonators and demonstrate that in resonators with an appropriately designed stem connection to anchor the maximum achievable Q limit is set by either Thermoelastic dissipation (TED) or the Akhieser effect (AKE).