Gerald Urban

Abstract: The sensitivity of a piezoresistive microcantilever biosensor strongly depends on its ability to convert the surface stress-induced deflections into large resistance change. To improve the sensitivity, we present stepped microcantilever biosensor designs that show significant resistance change compared with commonly used rectangular designs. The cantilever is made of silicon dioxide with a u-shaped silicon piezoresistor. The surface stress-induced deflections, bimorph deflection, fundamental resonant frequency and self-heating properties of the cantilever are studied using the FEM software. The surface stress-induced deflections are compared against the analytical model derived in this work. Results show that stepped designs have better signal-to-noise ratio than the rectangular ones and cantilevers with l/L between 0.5 and 0.75 are better designs for improving sensitivity.

TL;DR: In this article, the authors presented a fabrication approach that allows electrode spacing in the sub-micrometer region by using standard equipment such as UV Mask Aligner, physical vapor deposition and diffusion furnace.

TL;DR: In this paper, a novel miniaturized amperometric carbon dioxide sensor with fabrication compatibility to most modern MEMS production techniques and with a miniaturization potential down to 100μm has been developed.

TL;DR: In this paper, the surface of platinum thin-film electrodes, which are used for electrochemical biosensors, was investigated by cyclic voltammetry and laser secondary neutral mass spectroscopy (LSNMS).