H
H. Hein
Publications - 4
Citations - 129
H. Hein is an academic researcher. The author has contributed to research in topics: LIGA & Resist. The author has an hindex of 4, co-authored 4 publications receiving 125 citations.
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Microfluidic components in LIGA technique
TL;DR: In this article, it is envisaged to integrate these micropumps into a module for handling gases and liquids, which can then be coupled with different sensor modules to form microsystems, e.g. for the detection of toxic chemicals in the environment or for bedside analysis in hospitals.
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Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators
TL;DR: In this paper, a new micromechanical device for controlling fluid flow in fluidic microactuators is presented by means of the LIGA technique, a bistable wall attachment amplifier (a fluidic flip-flop), with a nozzle width of 30 μm and a structural height of 500 μm, is manufactured.
Journal ArticleDOI
Sub-micron LIGA process for movable microstructures
TL;DR: The feasibility of making movable metal microstructures with lateral dimensions in the sub-micron range and aspect ratios of up to 100 was demonstrated in this paper, where the performance of the device was determined by the aspect ratio, not by its overall size.
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Movable microstructures made by a sub-micron LIGA process
TL;DR: In this article, an X-ray mask with absorbers 2.8 μm high was produced by a three-level technique using LIGA and a sacrificial layer technique.