H
Hans Norström
Researcher at Uppsala University
Publications - 77
Citations - 850
Hans Norström is an academic researcher from Uppsala University. The author has contributed to research in topics: Silicon & Sputtering. The author has an hindex of 16, co-authored 77 publications receiving 822 citations. Previous affiliations of Hans Norström include Ericsson & Infineon Technologies.
Papers
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150 mm Silicon-on-polycrystalline-Silicon Carbide
TL;DR: In this paper, a novel rapid thermal treatment step was introduced before furnace annealing to avoid bubble formation, cracks and breakage, and the reamining Si device layer was shown to be stress free by Raman spectroscopy and X-ray diffraction.
Journal ArticleDOI
Application of the Langmuir Probe in Sputtering Techniques
Journal ArticleDOI
Oxide-Free Silicon to Silicon Carbide Heterobond
TL;DR: In this paper, thin crystalline device layers of Si were bonded to Si-faced SiC wafers, with eithera chemical or a thermal oxide interface layer, successfully removed by oxygen out-d...
Patent
Inductors for integrated circuits and method thereof
Ted Johansson,Hans Norström +1 more
TL;DR: In this article, the quality factor of spiral inductors or coils is improved by partially removing a semiconductor substrate (301) under the inductor (305) by etching trenches (303), which are refilled with isolating material.