Showing papers by "Helmut Seidel published in 2017"
TL;DR: In this paper, the gas sensing properties of WO 3 thin films deposited by ps-pulsed laser deposition are compared, for different layers with increasing porosity with increasing oxygen pressure during deposition.
Abstract: In this study we report on an investigation of the gas sensing properties of WO 3 thin films deposited by ps-pulsed laser deposition. Morphological, electrical and gas sensing properties with respect to CO and NO 2 are compared, for different layers with increasing porosity with increasing oxygen pressure during deposition. The base resistance under ambient conditions was investigated and found to be highly dependent on the morphology, controlled by the grain–grain contacts. We found that highly porous films show also high resistive response to NO 2 and CO.
15 citations
TL;DR: In this article, the properties of tantalum nitride thin films sputter deposited with and without breaks on pure and oxidized silicon wafers were investigated with respect to their potential use as strain gauges in micromachined sensors for harsh environmental applications.
11 citations