There is, I think, something ethereal about i —the square root of minus one. I remember first hearing about it at school. It seemed an odd beast at that time—an intruder hovering on the edge of reality.

Usually familiarity dulls this sense of the bizarre, but in the case of i it was the reverse: over the years the sense of its surreal nature intensified. It seemed that it was impossible to write mathematics that described the real world in …

I and i

Photoacoustic (PA) imaging, also called optoacoustic imaging, is a new biomedical imaging modality based on the use of laser-generated ultrasound that has emerged over the last decade. It is a hybrid modality, combining the high-contrast and spectroscopic-based specificity of optical imaging with the high spatial resolution of ultrasound imaging. In essence, a PA image can be regarded as an ultrasound image in which the contrast depends not on the mechanical and elastic properties of the tissue, but its optical properties, specifically optical absorption. As a consequence, it offers greater specificity than conventional ultrasound imaging with the ability to detect haemoglobin, lipids, water and other light-absorbing chomophores, but with greater penetration depth than purely optical imaging modalities that rely on ballistic photons. As well as visualizing anatomical structures such as the microvasculature, it can also provide functional information in the form of blood oxygenation, blood flow and temperature. All of this can be achieved over a wide range of length scales from micrometres to centimetres with scalable spatial resolution. These attributes lend PA imaging to a wide variety of applications in clinical medicine, preclinical research and basic biology for studying cancer, cardiovascular disease, abnormalities of the microcirculation and other conditions. With the emergence of a variety of truly compelling in vivo images obtained by a number of groups around the world in the last 2–3 years, the technique has come of age and the promise of PA imaging is now beginning to be realized. Recent highlights include the demonstration of whole-body small-animal imaging, the first demonstrations of molecular imaging, the introduction of new microscopy modes and the first steps towards clinical breast imaging being taken as well as a myriad of in vivo preclinical imaging studies. In this article, the underlying physical principles of the technique, its practical implementation, and a range of clinical and preclinical applications are reviewed.

/pdf/biomedical-photoacoustic-imaging-4s982wv96j.pdf

Biomedical photoacoustic imaging

Objective: To demonstrate optical coherence tomography for high-resolution, noninvasive imaging of the human retina. Optical coherence tomography is a new imaging technique analogous to ultrasound B scan that can provide cross-sectional images of the retina with micrometer-scale resolution. Design: Survey optical coherence tomographic examination of the retina, including the macula and optic nerve head in normal human subjects. Settings Research laboratory. Participants: Convenience sample of normal human subjects. Main Outcome Measures: Correlation of optical coherence retinal tomographs with known normal retinal anatomy. Results: Optical coherence tomographs can discriminate the cross-sectional morphologic features of the fovea and optic disc, the layered structure of the retina, and normal anatomic variations in retinal and retinal nerve fiber layer thicknesses with 10- μm depth resolution. Conclusion: Optical coherence tomography is a potentially useful technique for high depth resolution, cross-sectional examination of the fundus.

Optical Coherence Tomography of the Human Retina

Current medical imaging technologies allow visualization of tissue anatomy in the human body at resolutions ranging from 100 micrometers to 1 millimeter. These technologies are generally not sensitive enough to detect early-stage tissue abnormalities associated with diseases such as cancer and atherosclerosis, which require micrometer-scale resolution. Here, optical coherence tomography was adapted to allow high-speed visualization of tissue in a living animal with a catheter-endoscope 1 millimeter in diameter. This method, referred to as "optical biopsy," was used to obtain cross-sectional images of the rabbit gastrointestinal and respiratory tracts at 10-micrometer resolution.

In Vivo Endoscopic Optical Biopsy with Optical Coherence Tomography

Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

Nonmechanical steering of optical beams will enable revolutionary systems with random access pointing, similar to microwave radar phased arrays. An early approach was birefringent liquid crystals writing a sawtooth phase profile in one polarization, using 2pi resets. Liquid crystals were used because of high birefringence. Fringing fields associated with voltage control required to implement the 2pi resets have limited the efficiency and steering angle of this beam steering approach. Because of steering angle limitations, this conventional liquid crystal steering approach is usually combined with a large angle step-steering approach. Volume holograms, birefringent prisms or sawtooth-profile birefringent phase gratings, and circular-type polarization gratings are the large angle step steering approaches that will be reviewed in this paper. Alternate steering approaches to the combined liquid crystal and step-steering approach exist. Microelectromechanical system mirrors, lenslet arrays, electrowetting, and a variable birefringent grating approach will be reviewed and compared against the conventional liquid crystal and step-steering approaches. Step-steering approaches can also be combined with these approaches. Multiple nonmechanical steering approaches are developing that will allow high-efficiency steering, excellent steering accuracy, and wide fields of view.

A Review of Phased Array Steering for Narrow-Band Electrooptical Systems

An endoscopic optical coherence tomography (OCT) system based on a microelectromechanical mirror to facilitate lateral light scanning is described. The front-view OCT scope, adapted to the instrument channel of a commercial endoscopic sheath, allows real-time cross-sectional imaging of living biological tissue via direct endoscopic visual guidance. The transverse and axial resolutions of the OCT scope are roughly 20 and 10.2mum, respectively. Cross-sectional images of 500x1000 pixels covering an area of 2.9 mmx2.8 mm can be acquired at ~5 frames/s and with nearly 100-dB dynamic range. Applications in thickness measurement and bladder tissue imaging are demonstrated.

Endoscopic optical coherence tomography based on a microelectromechanical mirror.

Nonmechanical steering of optical beams will enable revolutionary systems with random access pointing, similar to microwave radar phased arrays. An early approach was birefringent liquid crystals writing a sawtooth phase profile in one polarization, using 2� resets. Liquid crystals were used because of high birefringence. Fringing fields associated with voltage control required to implement the 2� resets have limited the efficiency and steering angle of this beam steering approach. Because of steering angle limitations, this conventional liquid crystal steering approach is usually combined with a large angle step-steering approach. Volume holograms, birefringent prisms orsawtooth-profile birefringentphase gratings, andcircular-type polarizationgratingsarethelargeanglestepsteeringapproaches that will be reviewed in this paper. Alternate steering approaches to the combined liquid crystal and step-steering approach exist. Microelectromechanical system mirrors, lenslet arrays, electro- wetting, and a variable birefringent grating approach will be reviewed and compared against the conventional liquid crystal and step-steering approaches. Step-steering approaches can also be combined with these approaches. Multiple nonmechan- ical steering approaches are developing that will allow high- efficiency steering, excellent steering accuracy, and wide fields of view.

A Review of Phased Array Steering for Narrow-Band Electrooptical Systems Rapid, accurate, non-mechanical techniques for steering optical beams can provide the kind of efficient random access pointing offered by microwave radars.

Presents a new fabrication sequence for integrated-silicon microstructures designed and manufactured in a conventional complementary metal-oxide-semiconductor (CMOS) process. The sequence employs a post-CMOS deep silicon backside etch, which allows fabrication of high aspect ratio (25:1) and flat (greater than 10 mm radius of curvature) MEMS devices with integrated circuitry. A comb-drive resonator, a cantilever beam array and a z-axis accelerometer were fabricated using this process sequence. Electrical isolation of single-crystal silicon was realized by using the undercut of the reactive ion etch (RIE) process. Measured out-of-plane curling across a 120-/spl mu/m-wide 25-/spl mu/m-thick silicon released plate was 0.15 /spl mu/m, which is about ten times smaller than curl of the identical design as a thin-film CMOS microstructure. The z-axis DRIE accelerometer structure is 0.4 mm by 0.5 mm in size and has a 25-/spl mu/m-thick single-crystal silicon proof mass. The measured noise floor is 1 mG//spl radic/Hz, limited by electronic noise. A vertical electrostatic spring "hardening" effect was theoretically predicted and experimentally verified.

Post-CMOS processing for high-aspect-ratio integrated silicon microstructures

In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.

Huikai Xie

Papers

A Review of Phased Array Steering for Narrow-Band Electrooptical Systems

Endoscopic optical coherence tomography based on a microelectromechanical mirror.

A Review of Phased Array Steering for Narrow-Band Electrooptical Systems Rapid, accurate, non-mechanical techniques for steering optical beams can provide the kind of efficient random access pointing offered by microwave radars.

Post-CMOS processing for high-aspect-ratio integrated silicon microstructures

MEMS Mirrors for LiDAR: A review.