Hyung Joun Yoo

TL;DR: In this article, a new method for dry etching of silicon dioxide for surface micromachining is presented to obtain very compliant polysilicon microstructures with negligible stiction problem and to greatly simplify the overall releasing procedure as well.

TL;DR: A highly sensitive wearable sensor made of a robust bio-based supramolecular polymer that is capable of self-healing via hydrogen bonding is presented, providing a new toolset that can easily be knitted into textile items to fabricate wearable sensors that show impressive self- healing efficiency.

TL;DR: In this paper, the authors present an apparatus for transferring a wafer in a semiconductor manufacturing process, which includes a holder capable of holding the side of the wafer, wafer transfer assembly including an actuator of holder and a detector that detects a malfunction of holder, and a process reactor having a vacuum exhaust port installed under a Wafer chuck so as to guide gas in an axially symmetric flow pattern.

TL;DR: A vibrating disk type micro-gyroscope and a method of manufacturing thereof is described in this paper, which includes a support platform for supporting a vibration disk, the vibrating disks converting a resonance frequency into two beat frequencies, a bottom detection electrode for detecting the angular velocity of the gyroscope from a detection of the electrostatic capacitance changes between the bottom detector electrode and the vibrator, and an upper drive electrode for exciting the vibration disk.

TL;DR: In this article, a portable multi-gas sensing module with chemiresistive gas sensors on a micro-electro-mechanical-systems (MEMS)-based heating platform is proposed.