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Ilia Kalinovski
Publications - 1
Citations - 117
Ilia Kalinovski is an academic researcher. The author has contributed to research in topics: Photolithography & Multiple patterning. The author has an hindex of 1, co-authored 1 publications receiving 117 citations.
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PDL oxide enabled pitch doubling
Nader Shamma,Wen-Ben Chou,Ilia Kalinovski,Don Schlosser,Tom Mountsier,Collin Mui,Raihan Tarafdar,Bart van Schravendijk +7 more
TL;DR: In this article, the results of fabrication of sub-50nm features on a 100nm pitch by the PDL-spacer DP process using 0.85 NA dry ArF lithography are reported.