Showing papers by "Jaan Aarik published in 1997"
TL;DR: In this article, the dependence of optical characteristics on the structure of atomic layer-deposited titania (TiO 2 ) thin films has been studied and the formation of preferentially oriented crystal (anatase) structure contributes to this increase of refractive index most significantly.
273 citations
TL;DR: In this article, a quartz crystalline mass-sensor was exploited to detect the adsorption processes at the gas-solid interface during the film growth, and the value of the diffusion coefficient D=0.0075 m2/s for gas-phase Ta(OC2H5)5 has been calculated at 250°C.
143 citations
TL;DR: In this article, the authors present and discuss the Ti 2p and O 1s X-ray absorption spectra and resonant photoelectron emission spectra (RPES) of the various polymorphic forms (TiO2-II, rutile and anatase) of TiO2.
106 citations
TL;DR: The role of precursor doses and purge times on the atomic layer deposition (ALD) of high-density α-PbO 2 -type TiO 2 polymorph (TiO 2-II) is studied in this paper.
61 citations
TL;DR: In this paper, the secondary reaction of HCl with the growing metal oxide surface during atomic layer deposition from a metal chloride and water is investigated using model calculations and the dependences of the thickness profile on the reactivity of HCL and on the adsorption of the metal chloride are analyzed.
Abstract: The secondary reaction of HCl with the growing metal oxide surface during atomic layer deposition from a metal chloride and water is investigated using model calculations. HCl released during chemisorption of a metal chloride occupies adsorption sites for the metal chloride which results in a decrease in the film thickness in the gas-flow direction. The calculation model based on the continuity equation and kinetic equations for the surface coverage is described. The dependences of the thickness profile on the reactivity of HCl and on the adsorption of the metal chloride are analysed.
50 citations