J
Jeffrey Campbell
Researcher at Applied Materials
Publications - 5
Citations - 222
Jeffrey Campbell is an academic researcher from Applied Materials. The author has contributed to research in topics: Collar & Deposition (chemistry). The author has an hindex of 3, co-authored 5 publications receiving 222 citations.
Papers
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Patent
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems
David K. Carlson,Satheesh Kuppurao,Howard Beckford,Herman Diniz,Kailash Kiran Patalay,Brian H. Burrows,Jeffrey Campbell,Zouming Zhu,Xiaowei Li,Errol Antonio C. Sanchez +9 more
TL;DR: In this paper, a method and apparatus for delivering precursor materials to a processing chamber is described, which includes a gas distribution assembly having multiple gas delivery zones, each zone may include a plenum having an inlet for receiving a precursor gas and at least one source of non-thermal energy, such as an infrared light source.
Patent
Substrate support with adjustable lift and rotation mount
TL;DR: In this paper, a method and apparatus for positioning a substrate support within a processing chamber is described, which is laterally positionable relative to the first portion of the substrate support.
Patent
Modular cvd epi 300mm reactor
Brian H. Burrows,Craig Metzner,Dennis L. Demars,Roger N. Anderson,Juan Chacin,David K. Carlson,Ishikawa David Masayuki,Jeffrey Campbell,Richard O. Collins,Keith M. Magill,Imran Afzal +10 more
TL;DR: In this paper, a modular semiconductor processing cell is proposed for processing semiconductor substrates, consisting of a chamber having an inject cap, a gas panel module configured to supply one or more processing gas to the chamber through the inject cap and a lamp module positioned below the chamber.
Patent
Modular CVD reactor
TL;DR: In this article, a modular semiconductor processing cell is proposed for processing semiconductor substrates. But it is not suitable for the use in a cluster tool, as it is unsuitable to be used in a large number of nodes.