Z
Zouming Zhu
Researcher at Applied Materials
Publications - 2
Citations - 199
Zouming Zhu is an academic researcher from Applied Materials. The author has contributed to research in topics: Deposition (chemistry). The author has an hindex of 1, co-authored 2 publications receiving 199 citations.
Papers
More filters
Patent
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems
David K. Carlson,Satheesh Kuppurao,Howard Beckford,Herman Diniz,Kailash Kiran Patalay,Brian H. Burrows,Jeffrey Campbell,Zouming Zhu,Xiaowei Li,Errol Antonio C. Sanchez +9 more
TL;DR: In this paper, a method and apparatus for delivering precursor materials to a processing chamber is described, which includes a gas distribution assembly having multiple gas delivery zones, each zone may include a plenum having an inlet for receiving a precursor gas and at least one source of non-thermal energy, such as an infrared light source.