J
Jia Wei Lin
Researcher at National Chiao Tung University
Publications - 1
Citations - 18
Jia Wei Lin is an academic researcher from National Chiao Tung University. The author has contributed to research in topics: Gate oxide & Transconductance. The author has an hindex of 1, co-authored 1 publications receiving 9 citations.
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In 0.53 Ga 0.47 As FinFET and GAA-FET With Remote-Plasma Treatment
Quang Ho Luc,Kun Sheng Yang,Jia Wei Lin,Chia Chi Chang,Huy Binh Do,Sa Hoang Huynh,Minh Thien Huu Ha,Tuan Anh Nguyen,Yueh Chin Lin,Chenming Hu,Edward Yi Chang +10 more
TL;DR: In this paper, a remote NH3/N2 plasma treatment after gate oxide deposition for improving the electrical characteristics and the reliability of In0.53Ga0.47As FinFETs was presented.