J
Johannes Peterus Henricus De Kuster
Researcher at Carl Zeiss AG
Publications - 1
Citations - 451
Johannes Peterus Henricus De Kuster is an academic researcher from Carl Zeiss AG. The author has contributed to research in topics: Secondary emission & Radiation. The author has an hindex of 1, co-authored 1 publications receiving 451 citations.
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Lithographic apparatus, and device manufacturing method
Maarten Marinus Johannes Wilhelmus Van Herpen,Vadim Yevgenyevich Banine,Johannes Peterus Henricus De Kuster,Johannes Hubertus Josephina Moors,Lucas Henricus Johannes Stevens,Bastiaan Theodoor Wolschrijn,Yurii Victorovitch Sidelnikov,Marc Hubertus Lorenz Van Der Velden,Wouter Anthon Soer,Thomas Stein,K Kurt Gielissen +10 more
TL;DR: In this article, a lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is described, which includes a first radiation dose detector and a second radiation dose detectors, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux.