Yurii Victorovitch Sidelnikov

TL;DR: In this article, a lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is described, which includes a first radiation dose detector and a second radiation dose detectors, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux.

TL;DR: In this paper, a foil trap is located in a path of a radiation beam, and a voltage application circuit is coupled to the strips to apply voltage differences between pairs of adjacent ones of the strips.

TL;DR: In this article, the origin and nature of high-energy ions emitted by a discharge produced plasma source were studied using gated pinhole camera imaging, and it was shown that this consists mainly of oxygen ions emitted from a region near the cathode.

TL;DR: In this article, a wheel trap is arranged in a path of the radiant beam, and a voltage-applying circuit is connected to the strips 34 to apply a voltage difference between adjoining strip couples of the wheel trap.

TL;DR: In this paper, an electrical potential application circuit is constructed and arranged to apply an electric potential to the grid so that the grid repels electrons emitted by the plasma radiation source and creates a positive space charge between the grid and the foil trap to deflect ions emitted by a plasma radiation ion to the foil.