Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.

Substrate Processing Apparatus

An apparatus comprising a deformable lens element can be provided wherein a deformable lens element can be deformed to change an optical property thereof by the impartation of a force to the deformable lens element.

Apparatus and method comprising deformable lens element

Systems and methods for making and using handheld data readers comprising one or more fluid lenses. One or more fluid lenses are provided to allow a handheld data reader to perform such operations as reading indicia, including such additional operations as zooming, reorienting a viewing direction, focusing, adjusting an optical axis, and correcting for the effects of motion such as hand jitter. The fluid lens or lenses can be operated for example by applying electrical signals to fluid lenses comprising a plurality of fluids including at least one that is conductive and at least one that is non-conductive.

Data reader apparatus having an adaptive lens

A focus module contains a boundary element and a focus element. The focus element includes a fluid and a deformable membrane, with the fluid being entrapped between the boundary element and the deformable membrane. The focus module also includes a pressure element, which is capable of deforming the focus element by pressing on the deformable membrane in the direction of the boundary element.

Focus module and components with actuator

The invention describes devices for performing thermodynamic work on a fluid, such as pumps, compressors and fans. The thermodynamic work may be used to provide a driving force for moving the fluid. Work performed on the fluid may be transmitted to other devices, such as a piston in a hydraulic actuation device. The devices may include one or more electroactive polymer transducers with an electroactive polymer that deflects in response to an application of an electric field. The electroactive polymer may be in contact with a fluid where the deflection of the electroactive polymer may be used to perform thermodynamic work on the fluid. The devices may be designed to efficiently operate at a plurality of operating conditions, such as operating conditions that produce an acoustic signal above or below the human hearing range. The devices may be used in thermal control systems, such as refrigeration system, cooling systems and heating systems.

Electroactive polymer devices for moving fluid

The invention describes devices for controlling fluid flow, such as valves. The devices may include one or more electroactive polymer transducers with an electroactive polymer that deflects in response to an application of an electric field. The electroactive polymer may be in contact with a fluid where the deflection of the electroactive polymer may be used to change a characteristic of the fluid. Some of the characteristic of the fluid that may be changed include but are not limited to 1) a flow rate, 2) a flow direction, 3) a flow vorticity, 4) a flow momentum, 5) a flow mixing rate, 6) a flow turbulence rate, 7) a flow energy, 8) a flow thermodynamic property. The electroactive polymer may be a portion of a surface of a structure that is immersed in an external fluid flow, such as the surface of an airplane wing or the electroactive polymer may be a portion of a surface of a structure used in an internal flow, such as a bounding surface of a fluid conduit.

Electroactive polymer devices for controlling fluid flow

A frictionless transport apparatus for transporting an object from a first to a second station is disclosed. The apparatus has a frame extending between the first and second stations and a carriage mounted for movement along said frame, in a levitated condition. A substantial portion of the weight of the carriage and load is supported by biasing magnets on the frame and carriage. The carriage and load are stabilized in a levitated condition by magnetic interactions between a diamagnetic plate on the carriage and a magnetic array extending along the frame. The carriage is moved in its levitated condition by a frictionless drive system, such as an electromagnetic, electrostatic, or pneumatic drive system. Also disclosed is a method of frictionless transport of an object between first and second stations.

Frictionless transport apparatus and method

Devices employing electroactive polymer actuators are disclosed. Acrylic dielectric material based actuators are optionally provided in which architectures are presented that allow for improved power output as compared with other known acrylic dielectric material based transducers. Such technology may be applied in motor-driven applications, lightweight flight applications and lighting applications among others.

High-speed acrylic electroactive polymer transducers

Combustion devices described herein comprise a compliant combustion chamber wall or segment. The compliant segment deforms during combustion in the combustion chamber. Some devices may include a compliant wall configured to stretch responsive to pressure generated by combustion of a fuel in the combustion chamber. A coupling portion translates deformation of the compliant segment or wall into mechanical output. One or more ports are configured to inlet an oxygen source and fuel into the combustion chamber and to outlet exhaust gases from the combustion chamber.

Jonathan R. Heim

Papers

Electroactive polymer devices for moving fluid

Electroactive polymer devices for controlling fluid flow

Frictionless transport apparatus and method

High-speed acrylic electroactive polymer transducers

Compliant walled combustion devices for producing mechanical and electrical energy