José Antonio Plaza

TL;DR: In this paper, two silicon-based sensor arrays are described and tested, one based on films deposited onto bulk silicon wafers and the second, on a novel micromachined device in which the heated membranes are suspended from glass posts to insure low power dissipation.

TL;DR: The possibility to control the strength of the coupling with the gate voltage holds promise for various experiments, such as quantum manipulation, mechanical signal processing, and the study of the quantum-to-classical transition.

TL;DR: In this paper, a generic multipurpose probe based on an array of 20 waveguide channels with microcantilevers acting as optical waveguides operated in the visible range is presented.

TL;DR: In this paper, the SU-8 quad beam optical accelerometers based on intensity modulation were optimized and characterized to achieve a reproducible experimental sensitivity of at least 13.1 dB/g.

TL;DR: In this article, a portable biosensor microsystem consisting of 20 micromechanical cantilevers produced in silicon technology, a polymer microfluidic system for delivery of the samples, an array of 20 vertical cavity surface emitting lasers (VCSELs) with collimated beams thanks to an integrated microlens array, an optical coupling element to provide the optical path required, and chips with the photodetectors and the CMOS circuitry for signal acquisition and conditioning, capable of measuring the cantilever deflection with sub-nanometer resolution.