Showing papers by "Kamaljit Rangra published in 1990"

TL;DR: In this article, the exposure current is monitored in-situ and the required correction to the exposure time is provided automatically in order to maintain uniform exposure globally, which leads to the loss of global linewidth control.

TL;DR: A method for extracting the features of a registration mark from its SEM image, for storing it as a template and for detection of similar registration marks on the wafer is described.