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Showing papers by "Kuei-Hsien Chen published in 1998"


Journal ArticleDOI
TL;DR: In this paper, the authors determined the direct band gap of the new SiCN to be around 3.8 eV at room temperature and showed that the SiCN compounds have a near band edge emission center.
Abstract: Crystalline thin films of SiCN have been grown by microwave plasma-enhanced chemical vapor deposition using H2, CH4, N2, and SiH4 gases. The ternary compound (C;Si)xNy exhibits a hexagonal structure and consists of a network wherein the Si and C are substitutional elements. While the N content of the compound is about 35–40 at. %, the extent of Si substitution varies and can be as low as 10 at. %. Optical properties of the SiCN compounds have been studied by photoluminescence (PL), piezoreflectance (PzR), and photothermal deflection (PDS) spectroscopies. From the PzR measurement, we determine the direct band gap of the new crystals to be around 3.8 eV at room temperature. PDS measurement shows two absorption features with the first peak at around 3.2 eV which is related to an indirect band gap. The second PDS peak occurred around 3.8 eV and is quite consistent with the direct band gap determined by PzR. From the PL measurement, it is also found that the SiCN compounds have a near band edge emission center...

166 citations


Journal ArticleDOI
TL;DR: In this article, it was shown that carbon nitride films can be synthesized by argon ion-beam sputtering from a biomolecular compound target, 8-aza-6-aminopurine (C4N6H4).
Abstract: Carbon nitride films have been synthesized by argon ion-beam sputtering from a biomolecular compound target, 8-aza-6-aminopurine (C4N6H4). The compound has a six-membered ring structure similar to that existing in the hypothetical β-C3N4. Except for the target material, no other source of nitrogen was used during sputtering deposition. It was found that crystalline carbon nitride with high N/C atomic composition ratios of 0.43–0.56 can be formed even at room temperature. The infrared spectra of the film exhibit two peaks at 1383 and 1643 cm−1, corresponding to C–N and C=N stretching modes, respectively. No detectable peak at 2200 cm−1 (C≡N stretching mode) is observed. Both x-ray diffraction and transmission electron microscopy show a very strong broad peak at 3.2 A, comparable to the d spacing of the (110) orientation in the β-C3N4 structure. However, it is suggested that the film contains a nanocrystalline phase with a crystal structure yet to be determined.

32 citations


Journal ArticleDOI
TL;DR: In this paper, the growth of highly transparent nano-crystalline diamond films on quartz substrates by microwave plasma enhanced CVD was reported, and the effects of methane fraction in the source gas, substrate temperature and substrate pretreatment on the structural and optical properties of these films were studied.

31 citations



Journal ArticleDOI
TL;DR: In this article, a two-stage method for growth of highly transparent nano-crystalline diamond films with very low surface roughness was proposed. But the first stage involves achieving high nucleation density on the substrate by using low methane concentration in the source gas, while the second stage involves growth at higher methane concentrations in order to achieve a low degree of crystallinity in the films, and consequently low surface Roughness.

26 citations


Journal ArticleDOI
TL;DR: Optical transmittance of the nanocrystalline diamond films has been studied as a function of grain size of the diamond powder used for substrate pretreatment and the methane fraction in the source gas as mentioned in this paper.
Abstract: Optical transmittance of the nanocrystalline diamond films has been studied as a function of grain size of the diamond powder used for substrate pretreatment and the methane fraction in the source gas. It has been observed that for CH4 fractions below 13%, the films grown on substrates pretreated with finer diamond powder are more transparent, while this trend reverses for CH4 fractions above 13%. These variations in the transparency of the films correlate very well with their corresponding surface roughness. Nanocrystalline/amorphous diamond films with transmittance of greater than 80% beyond 700 nm and with average surface roughness as low as 61 A have been obtained for CH4 fractions as high as 42% in the source gas. Interestingly, these films do not show an obvious presence of any graphitic carbon, and the structural ordering of the amorphous sp3-bonded phase also seems to be insensitive to the CH4 content of the source gas.

18 citations


Journal ArticleDOI
TL;DR: In this article, a novel bio-molecular target material, instead of the conventional graphite target, is successfully developed to deposit the crystalline carbon nitride films, which consists of a high N/C ratio as well as a 6-fold carbonitro-ring structure similar to that in the hypothetical C3N4.

15 citations


Journal ArticleDOI
TL;DR: In this paper, the growth of highly transparent nano-crystalline diamond films on quartz substrates by microwave plasma enhanced CVD was reported, and a growth model for explaining the dependence of optical transparency on various deposition parameters was also proposed.

15 citations


Journal ArticleDOI
TL;DR: In this paper, the synthesis and characterization of an organic-inorganic hybrid compound [WO3(2,2′-bipy] (2 2,2′ − bipy = 2,2−bipyridine) is presented.
Abstract: The hydrothermal synthesis and characterization of an organic–inorganic hybrid compound [WO3(2,2′-bipy)] (2,2′-bipy=2,2′-bipyridine) is presented. This compound was characterized by various techniques including Raman and IR spectroscopy, XRD and thermogravimetric analysis. Structural analysis of the compound by Raman and IR data shows that it has a novel tungstate structure with 2,2′-bipy coordinated to tungsten. The X-ray powder diffraction data of the compound are indexed to a monoclinic cell with a=14.313(4), b=9.603(2), c=7.288(2) A,β=102.07(2)°. The structure of [WO3(2,2′-bip\y)] adopts a chain-like framework consisting of corner-shared distorted octahedra (WO4N2) with 2,2′-bipy acting as a bidentate ligand whose rings fan out from the chain. Upon heating, [WO3(2,2′-bipy)] retains its structural integrity until 300°C, followed by a gradual loss of 2,2′-bipy which leads to the formation of WO3 at ca. 475°C. The thermal decomposition is observed to proceed through a transitional intermediate, [W4O12(2,2′-bipy)], the structure of which is proposed and discussed.

5 citations


Journal ArticleDOI
TL;DR: In this paper, the authors measured X-ray absorption spectra of crystalline (c)-Si-C-N thin film at the C and Si K-edge using the sample drain current mode, and at the N Kedge using fluorescent mode.

3 citations