scispace - formally typeset
L

L. Sansonnens

Researcher at École Polytechnique Fédérale de Lausanne

Publications -  40
Citations -  1587

L. Sansonnens is an academic researcher from École Polytechnique Fédérale de Lausanne. The author has contributed to research in topics: Silane & Plasma. The author has an hindex of 22, co-authored 40 publications receiving 1505 citations.

Papers
More filters
Journal ArticleDOI

Time-resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments

TL;DR: In this article, a simple negative ion polymerization scheme was proposed to solve the problem of negative polysilicon hydride ion formation in a power-modulated rf silane plasma.
Journal ArticleDOI

Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

TL;DR: In this paper, the authors used a lens-shaped circular electrode to measure the correction of plasma nonuniformity due to the standing wave effect in a large area very high frequency plasma reactor.
Journal ArticleDOI

Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H2 discharges

TL;DR: In this article, the microstructure transition from amorphous to microcrystalline silicon is defined in terms of the silane concentration in the plasma as opposed to the input gas flow.
Journal ArticleDOI

A voltage uniformity study in large-area reactors for RF plasma deposition

TL;DR: In this paper, a two-dimensional analytic model for the calculation of the voltage distribution across the electrode area is presented, which is in good agreement with measurements performed without plasma at 13.56 MHz and 70 MHz in a large-area reactor.
Journal ArticleDOI

Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering

TL;DR: In this paper, particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering was detected by ion-mass spectrometer and light-scattering.