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Alan Howling
Researcher at École Polytechnique Fédérale de Lausanne
Publications - 131
Citations - 3332
Alan Howling is an academic researcher from École Polytechnique Fédérale de Lausanne. The author has contributed to research in topics: Plasma & Silane. The author has an hindex of 32, co-authored 127 publications receiving 3070 citations. Previous affiliations of Alan Howling include École Polytechnique.
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Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition
TL;DR: In this paper, the authors compared the excitation frequency in radio-frequency (RF) plasmas with the 13.56 MHz industrial frequency in the same reactor and presented a comparative study of key discharge parameters such as deposition rates, plasma uniformity, ion impact energy, power transfer efficiency, and powder formation.
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Time-resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments
TL;DR: In this article, a simple negative ion polymerization scheme was proposed to solve the problem of negative polysilicon hydride ion formation in a power-modulated rf silane plasma.
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Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor
TL;DR: In this paper, the authors used a lens-shaped circular electrode to measure the correction of plasma nonuniformity due to the standing wave effect in a large area very high frequency plasma reactor.
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Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H2 discharges
TL;DR: In this article, the microstructure transition from amorphous to microcrystalline silicon is defined in terms of the silane concentration in the plasma as opposed to the input gas flow.
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Negative-Ion Mass-Spectra and Particulate Formation in Radio-Frequency Silane Plasma Deposition Experiments
TL;DR: In this paper, negative ions were only observed over a limited range of power modulation frequency which corresponds to particle-free plasma conditions, and the importance of negative ions regarding particulate formation was demonstrated and commented upon.