A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact, a separator, a plug contacting the source/drain contact and a wiring contacting the plug The fin structure protrudes from an isolation insulating layer and extends in a first direction The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction The source/drain region is disposed between the first and second gate structures The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region The first source/drain contact is disposed on the first source/drain region The separator is disposed adjacent to the first source/drain contact layer Ends of the first and second gate structures and an end of the source drain contact are in contact with a same face of the separator

Semiconductor device and a method for fabricating the same

A semiconductor device includes: a substrate; a power rail on the substrate; an active layer on the substrate and at same layer as the power rail; and a contact electrically connecting the power rail to the active layer The active layer includes source/drain terminals

Semiconductor device having buried power rail

Provided is a method for inserting a pre-designed filler cell, as a replacement to a standard filler cell, including identifying at least one gap among a plurality of functional cells. In some embodiments, a pre-designed filler cell is inserted within the at least one gap. By way of example, the pre-designed filler cell includes a layout design having a pattern associated with a particular failure mode. In various embodiments, a layer is patterned on a semiconductor substrate such that the pattern of the layout design is transferred to the layer on the semiconductor substrate. Thereafter, the patterned layer is inspected using an electron beam (e-beam) inspection process.

Integrated circuit filler and method thereof

An integrated circuit structure includes a set of gate structures, a first conductive structure, a first and second set of vias, and a first set of conductive structures. The set of gate structures is located at a first level. The first conductive structure extends in a first direction, overlaps the set of gate structures and is located at a second level. The first set of vias is between the set of gate structures and the first conductive structure. The first set of vias couple the set of gate structures to the first conductive structure. The first set of conductive structures extend in a second direction, overlap the first conductive structure, and is located at a third level. The second set of vias couple the first set of conductive structures to the first conductive structure, and is between the first set of conductive structures and the first conductive structure.

Integrated circuit, system for and method of forming an integrated circuit

Power grids of an IC are provided. A power grid includes first power traces disposed in a first metal layer and parallel to a first direction, second power traces disposed in a second metal layer and parallel to a second direction that is perpendicular to the first direction, and third power traces disposed in the first metal layer parallel to the first direction. The first power traces arranged in the same straight line are separated from each other by a plurality of first gaps. The third power traces arranged in the same straight line are separated from each other by a plurality of second gaps. Each first gap is surrounded by the two adjacent third power traces. Each second gap is surrounded by the two adjacent first power traces. The first power traces are coupled to the third power traces via the second power traces.

Power grid of integrated circuit

A method of forming a layout design for fabricating an integrated circuit (IC) is disclosed. The method includes identifying one or more areas in the layout design occupied by one or more segments of a plurality of gate structure layout patterns of the layout design; and generating a set of layout patterns overlapping the identified one or more areas. The plurality of gate structure layout patterns has a predetermined pitch smaller than a spatial resolution of a predetermined lithographic technology. A first layout pattern of the set of layout patterns has a width less than twice the predetermined pitch.

Method of Forming Layout Design

A semiconductor device includes a substrate having an active region, a first gate structure over a top surface of the substrate, a second gate structure over the top surface of the substrate, a pair of first spacers on each sidewall of the first gate structure, a pair of second spacers on each sidewall of the second gate structure, an insulating layer over at least the first gate structure, a first conductive feature over the active region and a second conductive feature over the substrate. Further, the second gate structure is adjacent to the first gate structure and a top surface of the first conductive feature is coplanar with a top surface of the second conductive feature.

Semiconductor device and method of manufacturing semiconductor device

A method of processing a gate electrode cutting (CUT) layout usable for fabricating an integrated circuit (IC) is disclosed. The method includes determining if a first CUT layout pattern and a second CUT layout pattern are in compliance with a predetermined spatial resolution requirement. If the first CUT layout pattern and the second CUT layout pattern are not in compliance with the predetermined spatial resolution requirement, a merged CUT layout pattern is generated based on the first CUT layout pattern, the second CUT layout pattern, and a stitching layout pattern, and a remedial connecting layout pattern is added to a conductive layer layout. The stitching layout pattern corresponds to a carved-out portion of a third gate electrode structure. The remedial connecting layout pattern corresponds to fabricating a conductive feature electrically connecting two portions of the third gate electrode structure that are separated by the corresponding carved-out portion.

System and method of processing cutting layout and example switching circuit

A semiconductor device includes a substrate having an active area, a gate structure over the active area, a lower conductive layer over and electrically coupled to the active area, and an upper conductive layer over and electrically coupled to the lower conductive layer. The lower conductive layer is at least partially co-elevational with the gate structure. The lower conductive layer includes first and second conductive segments spaced from each other. The upper conductive layer includes a third conductive segment overlapping the first and second conductive segments. The third conductive segment is electrically coupled to the first conductive segment, and electrically isolated from the second conductive segment.

Semiconductor device, layout of semiconductor device, and method of manufacturing semiconductor device

An integrated circuit comprises a first layer on a first level. The first layer comprises a set of first lines. The first lines each have a length and a width. The length of each of the first lines is greater than the width. The integrated circuit also comprises a second layer on a second level different from the first level. The second layer comprises a set of second lines. The second lines each have a length and a width. The length of each of the second lines is greater than the width. The integrated circuit further comprises a coupling configured to connect at least one first line of the set of first lines with at least one second line of the set of second lines. The coupling has a length and a width. The set of second lines has a pitch measured between the lines of the set of second lines in the first direction. The length of the first coupling is greater than or equal to the pitch.

Lin Chung-Te

Papers

Method of Forming Layout Design

Semiconductor device and method of manufacturing semiconductor device

System and method of processing cutting layout and example switching circuit

Semiconductor device, layout of semiconductor device, and method of manufacturing semiconductor device

Integrated circuit with elongated coupling