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Method of Forming Layout Design

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TLDR
In this article, a method of forming a layout design for fabricating an integrated circuit (IC) is disclosed, which includes identifying one or more areas in the layout design occupied by one or many segments of a plurality of gate structure layout patterns.
Abstract
A method of forming a layout design for fabricating an integrated circuit (IC) is disclosed. The method includes identifying one or more areas in the layout design occupied by one or more segments of a plurality of gate structure layout patterns of the layout design; and generating a set of layout patterns overlapping the identified one or more areas. The plurality of gate structure layout patterns has a predetermined pitch smaller than a spatial resolution of a predetermined lithographic technology. A first layout pattern of the set of layout patterns has a width less than twice the predetermined pitch.

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References
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System comprising a semiconductor device and structure

TL;DR: In this article, a system includes a semiconductor device consisting of a first single crystal silicon layer comprising first transistors, first alignment marks, and at least one metal layer overlying the first single-crystalline silicon layer.
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