L
Ling Chen
Researcher at Applied Materials
Publications - 2
Citations - 447
Ling Chen is an academic researcher from Applied Materials. The author has contributed to research in topics: Tantalum nitride & Layer (electronics). The author has an hindex of 2, co-authored 2 publications receiving 447 citations.
Papers
More filters
Patent
Integration of ALD tantalum nitride and alpha-phase tantalum for copper metallization application
Ling Chen,Hua Chung,Sean M. Seutter,Michael Yang,Ming Xi,Vincent W. Ku,Dien-Yeh Wu,Alan Ouye,Norman Nakashima,Barry Chin,Hong Zhang +10 more
TL;DR: In this paper, a method for forming a metal interconnect on a substrate is provided, which consists of depositing a refractory metal-containing barrier layer having a thickness less than about 20 angstroms on at least a portion of a metal layer by alternately introducing one or more pulses of metal containing compound and one or multiple pulses of nitrogen containing compound.
Patent
Cyclical deposition of refractory metal silicon nitride
TL;DR: In this paper, the authors present a method for cyclical layer deposition utilizing three or more precursors, where the pulses of two of the three precurrs are introduced simultaneously or sequentially.