M
Masaki Fujiwara
Researcher at Osaka Prefecture University
Publications - 2
Citations - 142
Masaki Fujiwara is an academic researcher from Osaka Prefecture University. The author has contributed to research in topics: Lithography & Deformation (engineering). The author has an hindex of 2, co-authored 2 publications receiving 141 citations.
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Journal ArticleDOI
Study of the resist deformation in nanoimprint lithography
Yoshihiko Hirai,Masaki Fujiwara,Takahiro Okuno,Yoshio Tanaka,M. Endo,Sigeo Irie,Kazuo Nakagawa,Masaru Sasago +7 more
TL;DR: In this article, numerical simulations and experimental studies are carried out to understand the deformation process of thin polymer film in nano-imprint lithography, and the areal penetration ratio of the polymer into the recessed groove of the mold and residual thickness underneath the mold are quantitatively evaluated.
Journal ArticleDOI
Fine pattern imprint lithography using dimpled mold
TL;DR: In this paper, an inverted pyramidal dimpled mold is fabricated by utilizing the peculiarity of an anisotropic wet chemical etching to form narrow gaps between neighboring dots, and a 250nm-pitched dot array is successfully fabricated by the fine mold with narrow gaps.