M
Michael Lang
Researcher at KLA-Tencor
Publications - 2
Citations - 8
Michael Lang is an academic researcher from KLA-Tencor. The author has contributed to research in topics: Automated optical inspection & Mask inspection. The author has an hindex of 2, co-authored 2 publications receiving 8 citations.
Papers
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Proceedings ArticleDOI
Wafer fab mask qualification techniques and limitations
Andre Poock,Stephanie Maelzer,Christopher A. Spence,Cyrus E. Tabery,Michael Lang,Guido Schnasse,Milko Peikert,Kaustuve Bhattacharyya +7 more
TL;DR: In this article, the authors compared the performance of two different mask inspection techniques, namely direct and indirect mask defect inspection, for 90nm and 65nm design rule. But the limitations of these techniques were not discussed.
Proceedings ArticleDOI
High-resolution mask inspection in advanced fab
Stephanie Maelzer,Andre Poock,Bryan Reese,Kaustuve Bhattacharyya,Farzin Mirzaagha,Stephen Cox,Michael Lang +6 more
TL;DR: In this paper, the adoption of such a high-resolution mask inspection system in wafer fab production is presented and discussed, which includes inspection results from advanced masks, layer and product-based inspection pixel assignment, defect disposition and overall Wafer fab strategies in day-to-day production towards mask inspection.