M
Michael Walsh
Researcher at Massachusetts Institute of Technology
Publications - 63
Citations - 5930
Michael Walsh is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Diamond & Quantum network. The author has an hindex of 26, co-authored 62 publications receiving 5303 citations.
Papers
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Proceedings ArticleDOI
A 128-Channel Diamond Quantum Memory Array Integrated in a Microphotonic Chip
Noel H. Wan,Tsung-Ju Lu,Kevin C. Chen,Michael Walsh,Matthew E. Trusheim,Lorenzo De Santis,Eric Bersin,Isaac B. Harris,Sara Mouradian,Ian R. Christen,Edward S. Bielejec,Dirk Englund +11 more
TL;DR: In this article, the authors demonstrate the integration of 128 waveguide-coupled diamond spin qubits with aluminum nitride photonics for high-rate entanglement distribution in a large quantum network.
Proceedings ArticleDOI
Design and Fabrication of a 128-Channel Array of Quantum Memories in Hybrid Photonic Circuits
Tsung-Ju Lu,Noel H. Wan,Kevin C. Chen,Michael Walsh,Matthew E. Trusheim,Lorenzo De Santis,Eric Bersin,Isaac B. Harris,Sara Mouradian,Ian R. Christen,Edward S. Bielejec,Dirk Englund +11 more
TL;DR: In this article, the design, fabrication, and integration of a 128-channel aluminum nitride photonic chip with tunable diamond quantum micro-chiplets containing silicon vacancy and germanium vacancy color centers are presented.
Journal ArticleDOI
Soft X-Rays for Deep Sub-100 Nm Lithography, with and Without Masks
Henry I. Smith,David Carter,J. Ferrera,Dario Gil,J. Goodberlet,Jeffrey Todd Hastings,M. H. Lim,Mitchell W. Meinhold,Rajesh Menon,Euclid E. Moon,Caroline A. Ross,T. A. Savas,Michael Walsh,Feng Zhang +13 more
TL;DR: In this paper, a new projection lithography technique, zone-plate-array lithography (ZPAL), has been proposed to reach the limits of the lithographic process, which can operate from UV to EUV to x-rays.
Proceedings ArticleDOI
Enabling nanoscale science and engineering via highly flexible low-cost maskless lithography
TL;DR: The role of lithography in the future of nanoscale science and engineering is to put high-density spatial information into nanosale assemblies as mentioned in this paper, and because information content determines the functionality of such assemblies, lithography will be a key enabler.
Proceedings ArticleDOI
Photonic crystal cavities in bulk diamond for efficient spin-photon interfaces
TL;DR: In this paper, a planar photonic crystal nanocavities from bulk diamond were fabricated with quality factors Q > 1 × 104 with resonances matched to the negatively charged nitrogen vacancy zero phonon line.