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Mitsuru Konno

Researcher at Hitachi

Publications -  62
Citations -  1194

Mitsuru Konno is an academic researcher from Hitachi. The author has contributed to research in topics: Scanning transmission electron microscopy & Focused ion beam. The author has an hindex of 15, co-authored 62 publications receiving 1087 citations. Previous affiliations of Mitsuru Konno include University of Tokyo.

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Oxygen Vacancy Induced Substantial Threshold Voltage Shifts in the Hf-based High-$K$ MISFET with p+poly-Si Gates -A Theoretical Approach

TL;DR: In this paper, a theoretical investigation of the origin of substantial threshold voltage (Vth) shifts observed in p+poly-Si gate Hf-based metal insulator semiconductor field effect transistors (MISFETs), by focusing on the effect of oxygen vacancy (VO) formation in HfO2, was made.
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Development of a gas injection/specimen heating holder for use with transmission electron microscope.

TL;DR: A new gas injection/specimen heating holder is developed for the purpose of in situ observation of gas reaction of materials at high temperatures in a transmission electron microscope at near-atomic resolution.
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Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system

TL;DR: In this study, elemental distributions of minor elements with weak signals were enhanced by applying principal component analysis (PCA), which is a superior technique to extract weak signals from a large dataset.