Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

Ion sources, systems and methods

Microlens array produced using hot embossing process

A quiet revolution is under way in technologies used for nanoscale cellular imaging. Focused ion beams, previously restricted to the materials sciences and semiconductor fields, are rapidly becoming powerful tools for ultrastructural imaging of biological samples. Cell and tissue architecture, as preserved in plastic-embedded resin or in plunge-frozen form, can be investigated in three dimensions by scanning electron microscopy imaging of freshly created surfaces that result from the progressive removal of material using a focused ion beam. The focused ion beam can also be used as a sculpting tool to create specific specimen shapes such as lamellae or needles that can be analyzed further by transmission electron microscopy or by methods that probe chemical composition. Here we provide an in-depth primer to the application of focused ion beams in biology, including a guide to the practical aspects of using the technology, as well as selected examples of its contribution to the generation of new insights into subcellular architecture and mechanisms underlying host-pathogen interactions.

/pdf/focused-ion-beams-in-biology-57s9llo4l9.pdf

Focused ion beams in biology

Review: Developments in micro/nanoscale fabrication by focused ion beams

https://ir.nctu.edu.tw:443/bitstream/11536/11561/1/000243315700088.pdf

Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding

Microfabrication of microlens array by focused ion beam technology

Combined with experimental milling, three-dimensional (3D) microfabrication by focused ion beam (FIB) technology has been studied. Rules among limiting aperture size, dwell time, retrace time, tail of Gaussian distribution, etc., have been analyzed in terms of experimental results. Some phenomena are explained from the theoretical point of view. In addition, influence of redeposition for the sidewall root of microstructure in the process of milling is analyzed, and the avoidance methods are used in the meantime. It was proved by experiment that beam current (representing ion beam energy) and beam spot size play an important role in the etching process. Nonlinear variation of these parameters led to the broadening of edge periphery and redeposition at the root of the sidewall. On the other hand, milling order is vital for the 3D microfabrication result by FIB sputtering due to the redeposition effect and profile broadening effect.

Experimental study of three-dimensional microfabrication by focused ion beam technology

The design, microfabrication and testing of diffractive optical elements (DOE's) with continuous relief and their use in fiber coupling, is discussed in detail. DOE's with diameter as small as 65 /spl mu/m are realized by means of focused ion beam (FIB) technology. A focused Ga/sup +/ ion beam is used to mill a continuous relief microstructure at an acceleration voltage of 50 kV. From the results of the test, a coupling efficiency of 75% was achieved. This indicates that the DOE's were suitably designed within the application requirements and satisfactorily manufactured by using FIB.

Ngoi Kok

Papers

Microfabrication of microlens array by focused ion beam technology

Experimental study of three-dimensional microfabrication by focused ion beam technology

Investigation of single mode fiber coupling using diffractive optical element with continuous relief fabricated by focused ion beam technology