Showing papers by "OH Okko Bosgra published in 2014"
TL;DR: The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage and confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.
Abstract: Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model complexity and fidelity to control the flexible dynamical behavior. The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage. Hereto, new connections between system identification and robust control are employed. The experimental results confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.
163 citations