M
Marc van de Wal
Researcher at ASML Holding
Publications - 17
Citations - 1139
Marc van de Wal is an academic researcher from ASML Holding. The author has contributed to research in topics: Robust control & Motion control. The author has an hindex of 10, co-authored 17 publications receiving 1040 citations. Previous affiliations of Marc van de Wal include Philips.
Papers
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Journal ArticleDOI
Survey A review of methods for input/output selection
Marc van de Wal,Bram de Jager +1 more
TL;DR: A set of criteria is proposed that a good IO selection method should possess, which is used to assess and compare the methods and it could be used as a guideline for new methods.
Journal ArticleDOI
LPV control for a wafer stage: beyond the theoretical solution
TL;DR: In this article, a linear parameter varying (LPV) control technique was proposed for position-dependent controllers that adapt themselves in order to achieve optimal closed-loop performance in IC-manufacturing.
Journal ArticleDOI
Multivariable feedback control design for high-precision wafer stage motion
TL;DR: In this article, a practically feasible procedure to design MIMO feedback controllers for electromechanical positioning devices, using H ∞ /μ techniques, is presented, where weighting filters are proposed to straightforwardly and effectively impose performance and uncertainty specifications.
Journal ArticleDOI
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage
Tom Oomen,Robbert van Herpen,Sander Quist,Marc van de Wal,OH Okko Bosgra,M Maarten Steinbuch +5 more
TL;DR: The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage and confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.
Journal ArticleDOI
Exploiting additional actuators and sensors for nano-positioning robust motion control
Rma Robbert van Herpen,Tom Oomen,Edward Kikken,Marc van de Wal,W.H.T.M. Aangenent,M Maarten Steinbuch +5 more
TL;DR: In this paper, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H ∞ -control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design.