scispace - formally typeset
M

Marc van de Wal

Researcher at ASML Holding

Publications -  17
Citations -  1139

Marc van de Wal is an academic researcher from ASML Holding. The author has contributed to research in topics: Robust control & Motion control. The author has an hindex of 10, co-authored 17 publications receiving 1040 citations. Previous affiliations of Marc van de Wal include Philips.

Papers
More filters
Journal ArticleDOI

Survey A review of methods for input/output selection

TL;DR: A set of criteria is proposed that a good IO selection method should possess, which is used to assess and compare the methods and it could be used as a guideline for new methods.
Journal ArticleDOI

LPV control for a wafer stage: beyond the theoretical solution

TL;DR: In this article, a linear parameter varying (LPV) control technique was proposed for position-dependent controllers that adapt themselves in order to achieve optimal closed-loop performance in IC-manufacturing.
Journal ArticleDOI

Multivariable feedback control design for high-precision wafer stage motion

TL;DR: In this article, a practically feasible procedure to design MIMO feedback controllers for electromechanical positioning devices, using H ∞ /μ techniques, is presented, where weighting filters are proposed to straightforwardly and effectively impose performance and uncertainty specifications.
Journal ArticleDOI

Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage

TL;DR: The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage and confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.
Journal ArticleDOI

Exploiting additional actuators and sensors for nano-positioning robust motion control

TL;DR: In this paper, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H ∞ -control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design.