A substrate supporting structure ( 50 ) for semiconductor processing, comprising a mounting table ( 51 ) for placing a processed substrate (W) disposed in a processing chamber ( 20 ), wherein temperature control spaces ( 507 ) for storing the fluid used as a heat exchange medium are formed in the mounting table ( 51 ), a conductive transmission path ( 502 ) is disposed to lead a high frequency power to the mounting table ( 51 ), and flow channels ( 505, 506 ) feeding or discharging the heat exchange medium fluid to or from the temperature control spaces ( 507 ) are formed in the transmission path ( 502 ).

Substrate supporting structure for semiconductor processing, and plasma processing device

An outdoor unit of an air conditioner is provided. The outdoor unit includes a base assembly defining a lower exterior of the outdoor unit and supporting a plurality of parts, left and right panels that are provided on the base assembly to define left and right exteriors of the outdoor unit, a pair of top panels that are provided between upper ends of the left and right panels to define a top exterior of the outdoor unit, a blower assembly including a blower fan generating air current and a motor providing a torque to the blower fan, a frame assembly supporting the blower assembly and including a pair of transverse supports interconnecting the left and right panels and a motor mount disposed between the pair of transverse supports to support the motor, and a shroud enclosing the blower fan and the motor and guiding airflow generated by the blower fan. The motor mount is received to an inside of the shroud.

Outdoor unit of air conditioner

An inlet header (22) of a microchannel heat pump heat exchanger has a tube (34) disposed therein and extending substantially the length of the inlet header (22), with the tube (34) having a plurality of openings (36) therein. During cooling mode operation, refrigerant is caused to flow into an open end of the tube (34) and along its length to thereby flow from the plurality of openings (36) into the inlet header (22) prior to entering the microchannels (24) to thereby provide a uniform flow of two-phase refrigerant thereto. A bi-flow expansion device (41) placed at the inlet end of the tube (34) allows for the expansion of liquid refrigerant into the tube (34) during periods in which the heat exchanger operates as an evaporator and allows the refrigerant to flow directly from the header (22) and around the tube (34) during periods in which the heat exchanger operates as a condenser coil.

Tube insert and bi-flow arrangement for a header of a heat pump

A plurality of honeycomb pipes bundling a plurality of fine tubes are inserted and fixed at desired positions in a refrigerant piping at proper intervals to form a silencer, and noise is reduced by straightening and homogenizing the disturbance of refrigerant and attenuating transmission of pressure pulsations.

Silencer and air conditioner

In a parallel flow heat exchanger having an inlet manifold connected to an outlet manifold by a plurality of parallel channels, a spirally shaped insert is disposed within the refrigerant flow path in the inlet manifold such that a swirling motion is imparted to the refrigerant flow in the manifold so as to cause a more uniform distribution of refrigerant to the individual channels. Various embodiments of the spirally shaped inserts are provided, including inserts designed for the internal flow of refrigerant therethrough and/or the external flow of refrigerant thereover.

Parallel flow evaporator with spiral inlet manifold

A heat exchanger, as mounted on the outdoor unit or indoor unit of an air conditioner system, is formed with a plurality of passages for a refrigerant. To this heat exchanger, there is connected a refrigerant distributor for distributing the refrigerant to the individual passages or for collecting the distributed refrigerant. This refrigerant distributor is constructed by soldering two corrugated plate members to form a refrigerant conduit between the corrugations. Before these plate members are soldered, the refrigerant conduit is either partially constricted to form a throttle portion or partially bulged to form a filter portion by fitting a filter member in the bulging portion when the plate members are soldered. Thus, the refrigerant distributor can set the diversion of the refrigerant to a predetermined ratio by the simple device while reducing the space and lowering the cost.

Air conditioner system having a refrigerant distributor and method of making same

PROBLEM TO BE SOLVED: To decrease channel resistance by providing a motor supporting plate for supporting a fan comprising a supply/suction fan and a drive motor for fan between the bottom plate of a housing and the drive motor for fan thereby halving the area of the motor supporting plate when viewed from the front side of an outdoor unit SOLUTION: A motor supporting plate 1 comprises a pair of main plates 2a, 2b and an auxiliary plate 3 wherein the fixing legs 6 of a drive motor 5 for fan are supported by the main plates 2a, 2b, at the upper ends thereof, and fixed to a bottom plate 7 by means of an auxiliary plate 3 A heat exchanger 8 is disposed on the back face side of the bottom plate 7 The motor supporting plate 1 is placed between the drive motor 5 for fan and the bottom plate 7 and not placed between the drive motor 5 and a top plate 10 A specified space is thereby ensured at the upper half in the housing defined by the bottom plate 7, a front plate 9, the top plate 10, and the like, and channel resistance is decreased by halving the occupation area of the motor supporting plate 1 when viewed from the front side of an outdoor unit

Outdoor unit for air conditioner

PROBLEM TO BE SOLVED: To improve strength of a heat exchanger while maintaining desired dripping performance by processing contacts of individual fins of superposed heat exchanger units as fins to become one or more points. SOLUTION: After part of a continued fin material corresponding to a fin end is cut, a convexo-concave shape is provided by pressing, and independent fins of the shape bent at upper and lower ends are obtained. Fin lower part end 101L of upper stage of the fin 101 and upper part end 101U of lower stage are crossed at least at one point in the fin shape, and the fins are brought into close contact with each other while preventing engagement of the fins. Then, a heat transfer tube 2 is inserted, several fin blocks are formed, and pipes are bent so that the fins are brought into contact with each other, all the fins are aligned in the same direction in the direction of bending, inserted, and aligned to the tube 2. When the tube 2 is bent, upper and lower fins are brought into contact with each other at two points. Thus, dripping properties and heat exchanger strength can be largely improved.

Heat exchanger and air conditioner

PURPOSE: To reduce and prevent the generation of refrigerant flowing sound by a method wherein a branching-pipeline, joining refrigerant immediately after branching into two flows, is arranged at the upstream side of a main pressure reducing means or an expansion valve to contrive the unification of gas and liquid two-phase flow refrigerant, flowing through a refrigerant pipeline, with a simple structure. CONSTITUTION: The unifying means of gas and liquid two-phase flow refrigerant is constituted of two pieces of branching pipelines, a uniton 1, a pipeline 2, a strainer 3, another pipeline 4, branching pipelines 11, 12, an expansion valve 5, the other pipeline 6, a muffler 7, a distributer 8 and pipelines 9, 10, which are connected sequentially. Gas and liquid two-phase flow refrigerant, which has flowed through the pipeline 2, is branched by the branching pipeline 11 and flows through the branching pipeline 12, then, joined at the part of an outlet port thereby gas phase flow and liquid-phase flow are mixed. According to this method, unified gas and liquid two-phase flow refrigerant is obtained whereby the generation of refrigerant flowing sound can be reduced and prevented.

Refrigerant pipeline for air conditioner

PURPOSE: To save the space and cut down the costs of an outdoor unit of an air conditioner by a method wherein a plate pipe type is applied to inlet and outlet piping of a heat exchanger to simplify the shape of the piping. CONSTITUTION: A U-shape refrigerant distributor 4 is made up of a pair of plate members that have grooves and are jointed together, and is connected to an inlet/outlet part of a heat exchanger 1. A rectangular hole 5 is formed in a part between the inlet and outlet of the distributor 4 to prevent heat conduction. Therefore, as the refrigerant distributor 4 is connected to the inlet/outlet part of the heat exchanger 1, the shape of the piping on the inlet/outlet side of the heat exchanger is simplified, resulting in space saving and a reduction of costs.

Okuzono Hideki

Papers

Air conditioner system having a refrigerant distributor and method of making same

Outdoor unit for air conditioner

Heat exchanger and air conditioner

Refrigerant pipeline for air conditioner

Outdoor unit and indoor unit of air conditioner and refrigerant distributor to be used for said outdoor and indoor units