P
P. Grosse
Researcher at RWTH Aachen University
Publications - 9
Citations - 459
P. Grosse is an academic researcher from RWTH Aachen University. The author has contributed to research in topics: Porous silicon & Etching (microfabrication). The author has an hindex of 6, co-authored 9 publications receiving 453 citations.
Papers
More filters
Journal ArticleDOI
Porosity superlattices: a new class of Si heterostructures
M.G. Berger,Ch. Dieker,Markus Thönissen,L. Vescan,Hans Lüth,H. Münder,W Theiss,M Wernke,P. Grosse +8 more
TL;DR: Porosity superlattices have been investigated by transmission electron microscopy, photoluminescence and reflectance spectroscopy in this article, and the results are in good agreement with the values calculated from the etching rate and time.
Journal ArticleDOI
Dielectric filters made of PS: advanced performance by oxidation and new layer structures
M. G. Berger,Ruediger Arens-Fischer,Markus Thönissen,Manja Krüger,Sophie Billat,Hans Lüth,S. Hilbrich,W Theiß,P. Grosse +8 more
TL;DR: In this paper, the effective dielectric function of PS was determined for different substrate doping levels as a function of the anodization current density by fitting reflectance spectra.
Journal ArticleDOI
Analysis of the depth homogeneity of p-PS by reflectance measurements
Markus Thönissen,M. G. Berger,Sophie Billat,Ruediger Arens-Fischer,Manja Krüger,Hans Lüth,W Theiß,S Hillbrich,P. Grosse,Gilles Lerondel,U. Frotscher +10 more
TL;DR: In this paper, the etch rate of p-PS with increasing etching time as well as changes of the porosity of buried layers with depth were investigated, which can be attributed to the influence of chemical etching and variations in the electrolyte composition with depth.
Journal ArticleDOI
Advanced characterization tools for thin films in low-E systems
Hansjörg Weis,T Müggenburg,P. Grosse,L Herlitze,I. Friedrich,Matthias Wuttig,Matthias Wuttig +6 more
TL;DR: In this article, it is shown that deviations between spectroscopic measurements and simulations are due to intermixing effects at one specific interface during the deposition process of a complete layer stack.
Journal ArticleDOI
Color-sensitive photodetector based on porous silicon superlattices
Michael Krüger,Michel Marso,M. G. Berger,Markus Thönissen,Sophie Billat,R. Loo,W. Reetz,Hans Lüth,S. Hilbrich,Rüdiger Arens-Fischer,P. Grosse +10 more
TL;DR: In this article, the color sensitivity of Si photodiodes was achieved by integrating porous silicon (PS) Bragg reflectors and Fabry-Perot filters, and the results were in good agreement with the reflectance spectra of the filters.