Quang T. Su

TL;DR: The sensitivity of a differential microphone suffers as the distance between the two pressure sensing locations decreases, resulting in an increase in the input sound pressure-referred noise floor, but in the microphone described here, both the diaphragm thermal noise and the electronic noise are minimized by a combination of novel diaphrate design and the use of low-noise optical sensing.

TL;DR: Results indicate that designing these new switches to respond quasi-statically to mechanical shock makes them robust against variations in shock shape and duration and can be promising to lower the cost of packaging for these switches since they can operate in atmospheric pressure with no hermetic sealing or costly package required.

TL;DR: In this article, a silicon microelectromechanical system microphone is described that detects sound pressure gradients using a diaphragm consisting of a stiffened plate that rotates around a central axis in response to sound pressure gradient.

TL;DR: In this article, the authors used a diffraction-based optical displacement detection method to detect the displacement of the microphone diaphragm by monitoring the change in the intensity of a diffracted laser beam.

TL;DR: In this article, a 3D structured diaphragm was fabricated using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer.