Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

THE difficulty of reconciling line spectra with the kinetic theory of gases, has been referred to by Prof. Fitzgerald (NATURE, January 3, p. 221). The following considerations show that it is possible under certain suppositions to have a number of spectral rays with a very restricted number of degrees of freedom. Most of us, I believe, now accept a definite atomic charge of electricity, and if each charge is imagined to be capable of moving along the surface of an atom, it would represent two degrees of freedom. If a molecule is capable of sending out a homogeneous vibration, it means that there must be a definite position of equilibrium of the “electron.” If there are several such positions, the vibrations may take place in several periods. Any one molecule may perform for a certain time a simple periodic oscillation about one position of equilibrium, and owing to some impact the electron may be knocked over into a new position. The vibrations under these circumstances would not be quite homogeneous, but if the electron oscillates about any one position sufficiently long to perform a few thousand oscillations, we should hardly notice the want of homogeneity. Each electron at a given time would only send out vibrations which in our instruments would appear as homogeneous. Each molecule could thus successively give rise to a number of spectral rays, and at any one time the electron in the different molecules would, by the laws of probability, be distributed over all possible positions of equilibrium, so that we should always see all the vibrations which any one molecule of the gas is capable of sending out. The probability of an electron oscillating about one of its positions of equilibrium need not be the same in all cases. Hence a line may be weak not because the vibration has a smaller amplitude, but because fewer molecules give rise to it. The fact that the vibrations of a gas are not quite homogeneous, is borne out by experiment. If impacts become more frequent by increased pressure, we should expect from the above views that the time during which an electron performs a certain oscillation is shortened; hence the line should widen, which is the case. I have spoken, for the sake of simplicity, as if an electron vibrating about one position of equilibrium could only do so in one period. If the forces called into play, by a displacement, depend on the direction of the displacement, there would be two possible frequencies. If the surface is nearly symmetrical, we should have double lines.

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The Kinetic Theory of Gases

A unified gas-kinetic scheme for continuum and rarefied flows IV

With discretized particle velocity space, a multi-scale unified gas-kinetic scheme for entire Knudsen number flows has been constructed based on the kinetic model in one-dimensional case (J. Comput. Phys., vol. 229 (2010), pp. 7747-7764). For the kinetic equation, to extend a one-dimensional scheme to multidimensional flow is not so straightforward. The major factor is that addition of one dimension in physical space causes the distribution function to become two-dimensional, rather than axially symmetric, in velocity space. In this paper, a unified gas-kinetic scheme based on the Shakhov model in two-dimensional space will be presented. Instead of particle-based modeling for the rarefied flow, such as the direct simulation Monte Carlo (DSMC) method, the philosophical principal underlying the current study is a partial-different- ial-equation (PDE)-based modeling. Since the valid scale of the kinetic equation and the scale of mesh size and time step may be significantly different, the gas evolu- tion in a discretized space is modeled with the help of kinetic equation, instead of directly solving the partial differential equation. Due to the use of both hydrody- namic and kinetic scales flow physics in a gas evolution model at the cell interface, the unified scheme can basically present accurate solution in all flow regimes from the free molecule to the Navier-Stokes solutions. In comparison with the DSMC and Navier-Stokes flow solvers, the current method is much more efficient than DSMC in low speed transition and continuum flow regimes, and it has better capability than NS solver in capturing of non-equilibrium flow physics in the transition and rarefied flow regimes. As a result, the current method can be useful in the flow simulation where both continuum and rarefied flow physics needs to be resolved in a single com- putation. This paper will extensively evaluate the performance of the unified scheme from free molecule to continuum NS solutions, and from low speed micro-flow to high speed non-equilibrium aerodynamics. The test cases clearly demonstrate that the uni- fied scheme is a reliable method for the rarefied flow computations, and the scheme provides an important tool in the study of non-equilibrium flow.

A Unified Gas-Kinetic Scheme for Continuum and Rarefied Flows II: Multi-Dimensional Cases

Thermal transport in nano-porous insulation of aerogel: Factors, models and outlook

This study analyses compressible gas flows through microchannels or microtubes, and develops two complete sets of asymptotic solutions. It is a natural extension of the previous work by Arkilic et al. on compressible flows through microchannels. First, by comparing the magnitudes of different forces in the compressible gas flow, we obtain proper estimations for the Reynolds and Mach numbers at the outlets. Second, based on these estimations, we obtain asymptotic analytical solutions of velocities, pressure and temperature distributions of compressible gas flow inside the microchannels and microtubes with a relaxation of the isothermal assumption, which was previously used in many studies. Numerical simulations of compressible flows through a microchannel and a microtube are performed by solving the compressible Navier-Stokes equations, with velocity slip and temperature jump wall boundary conditions. The numerical simulation results validate the analytical results from this study.

Gas flows in microchannels and microtubes

A hybrid continuum/particle approach is proposed for micro scale gas flows in this paper. The approach couples the DSMC‐IP method and a Navier‐Stokes solver with an adaptive interface. The continuum solver uses the particle cells as ghost cells because the IP method preserves the hydrodynamic information that the continuum solver uses. In order to generate particles from the continuum side, two strategies are proposed. The first one uses a condition similar to the Marshak condition in generating particles through the interface. The second strategy adopts buffer cells and reservoir cells, which avoids directly generating particles. The interface is determined by a continuum breakdown parameter that is evaluated in every time step. In order to track the interface, a mapping technique is used in the code. Numerical examples show that the hybrid approach couples the continuum solver and the particle method very smoothly. Simulated results also show the effects of the cutoff value of the continuum breakdown parameter.

/pdf/a-hybrid-continuum-particle-approach-for-micro-scale-gas-1ncv30kwjj.pdf

Quanhua Sun

Papers

A unified gas-kinetic scheme for continuum and rarefied flows IV

Gas flows in microchannels and microtubes

A Hybrid Continuum / Particle Approach for Micro‐Scale Gas Flows

Improved sampling techniques for the direct simulation Monte Carlo method

Numerical study of chemically reacting flow in a shock tube using a high-order point-implicit scheme