Showing papers by "R. Ryf published in 2009"
TL;DR: In this paper, a cantilever-based uncooled IR imager was developed utilizing a novel optical readout scheme based on inter-pixel interference and a series of small arrays (approximately 100×100 pixels) were fabricated using 8-in silicon MEMS processes.
Abstract: A cantilever-based uncooled IR imager was developed utilizing a novel optical readout scheme based on inter-pixel interference A series of small arrays (approximately 100 × 100 pixels) were fabricated using 8-in silicon MEMS processes The array design and process development will be discussed and initial uniformity and imaging results presented Future challenges in developing a direct-view IR imager will be addressed
33 citations